Porous Silicon Gradient Refractive Index Micro-Optics
Abstract
We see the emergence and growth of transformation optics over the past decade has revitalized interest in how a gradient refractive index (GRIN) can be used to control light propagation. Two-dimensional demonstrations with lithographically defined silicon (Si) have displayed the power of GRIN optics and also represent a promising opportunity for integrating compact optical elements within Si photonic integrated circuits. Here, we demonstrate the fabrication of three-dimensional Si-based GRIN micro-optics through the shape-defined formation of porous Si (PSi). Conventional microfabrication creates Si square microcolumns (SMCs) that can be electrochemically etched into PSi elements with nanoscale porosity along the shape-defined etching pathway, which imparts the geometry with structural birefringence. Free-space characterization of the transmitted intensity distribution through a homogeneously etched PSi SMC exhibits polarization splitting behavior resembling that of dielectric metasurfaces that require considerably more laborious fabrication. Coupled birefringence/GRIN effects are studied by way of PSi SMCs etched with a linear (increasing from edge to center) GRIN profile. The transmitted intensity distribution shows polarization-selective focusing behavior with one polarization focused to a diffraction-limited spot and the orthogonal polarization focused into two laterally displaced foci. Optical thickness-based analysis readily predicts the experimentally observed phenomena, which strongly match finite-element electromagnetic simulations.
- Authors:
-
- Univ. of Illinois at Urbana-Champaign, IL (United States). Beckman Inst. for Advanced Science and Technology
- Stanford Univ., CA (United States). Geballe Lab. for Advanced Materials
- Dow Chemical Co., Freeport, TX (United States)
- Department of Mechanical Science and Engineering, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1388664
- Grant/Contract Number:
- SC0001293
- Resource Type:
- Journal Article: Accepted Manuscript
- Journal Name:
- Nano Letters
- Additional Journal Information:
- Journal Volume: 16; Journal Issue: 12; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; Journal ID: ISSN 1530-6984
- Publisher:
- American Chemical Society
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; solar (photovoltaic), solid state lighting, phonons, thermal conductivity, electrodes - solar, materials and chemistry by design, optics, synthesis (novel materials), synthesis (self-assembly)
Citation Formats
Krueger, Neil A., Holsteen, Aaron L., Kang, Seung-Kyun, Ocier, Christian R., Zhou, Weijun, Mensing, Glennys, Rogers, John A., Brongersma, Mark L., and Braun, Paul V. Porous Silicon Gradient Refractive Index Micro-Optics. United States: N. p., 2016.
Web. doi:10.1021/acs.nanolett.6b02939.
Krueger, Neil A., Holsteen, Aaron L., Kang, Seung-Kyun, Ocier, Christian R., Zhou, Weijun, Mensing, Glennys, Rogers, John A., Brongersma, Mark L., & Braun, Paul V. Porous Silicon Gradient Refractive Index Micro-Optics. United States. https://doi.org/10.1021/acs.nanolett.6b02939
Krueger, Neil A., Holsteen, Aaron L., Kang, Seung-Kyun, Ocier, Christian R., Zhou, Weijun, Mensing, Glennys, Rogers, John A., Brongersma, Mark L., and Braun, Paul V. 2016.
"Porous Silicon Gradient Refractive Index Micro-Optics". United States. https://doi.org/10.1021/acs.nanolett.6b02939. https://www.osti.gov/servlets/purl/1388664.
@article{osti_1388664,
title = {Porous Silicon Gradient Refractive Index Micro-Optics},
author = {Krueger, Neil A. and Holsteen, Aaron L. and Kang, Seung-Kyun and Ocier, Christian R. and Zhou, Weijun and Mensing, Glennys and Rogers, John A. and Brongersma, Mark L. and Braun, Paul V.},
abstractNote = {We see the emergence and growth of transformation optics over the past decade has revitalized interest in how a gradient refractive index (GRIN) can be used to control light propagation. Two-dimensional demonstrations with lithographically defined silicon (Si) have displayed the power of GRIN optics and also represent a promising opportunity for integrating compact optical elements within Si photonic integrated circuits. Here, we demonstrate the fabrication of three-dimensional Si-based GRIN micro-optics through the shape-defined formation of porous Si (PSi). Conventional microfabrication creates Si square microcolumns (SMCs) that can be electrochemically etched into PSi elements with nanoscale porosity along the shape-defined etching pathway, which imparts the geometry with structural birefringence. Free-space characterization of the transmitted intensity distribution through a homogeneously etched PSi SMC exhibits polarization splitting behavior resembling that of dielectric metasurfaces that require considerably more laborious fabrication. Coupled birefringence/GRIN effects are studied by way of PSi SMCs etched with a linear (increasing from edge to center) GRIN profile. The transmitted intensity distribution shows polarization-selective focusing behavior with one polarization focused to a diffraction-limited spot and the orthogonal polarization focused into two laterally displaced foci. Optical thickness-based analysis readily predicts the experimentally observed phenomena, which strongly match finite-element electromagnetic simulations.},
doi = {10.1021/acs.nanolett.6b02939},
url = {https://www.osti.gov/biblio/1388664},
journal = {Nano Letters},
issn = {1530-6984},
number = 12,
volume = 16,
place = {United States},
year = {Mon Nov 07 00:00:00 EST 2016},
month = {Mon Nov 07 00:00:00 EST 2016}
}
Web of Science
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