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Title: Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis

Authors:
; ; ; ;
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Argonne-Northwestern Solar Energy Research Center (ANSER)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1387739
DOE Contract Number:  
SC0001059
Resource Type:
Journal Article
Journal Name:
Journal of Physical Chemistry. C
Additional Journal Information:
Journal Volume: 115; Journal Issue: 36; Related Information: ANSER partners with Northwestern University (lead); Argonne National Laboratory; University of Chicago; University of Illinois, Urbana-Champaign; Yale University; Journal ID: ISSN 1932-7447
Publisher:
American Chemical Society
Country of Publication:
United States
Language:
English
Subject:
catalysis (homogeneous), catalysis (heterogeneous), solar (photovoltaic), solar (fuels), photosynthesis (natural and artificial), bio-inspired, hydrogen and fuel cells, electrodes - solar, defects, charge transport, spin dynamics, membrane, materials and chemistry by design, optics, synthesis (novel materials), synthesis (self-assembly)

Citation Formats

Tseng, Yu-Chih, Peng, Qing, Ocola, Leonidas E., Elam, Jeffrey W., and Darling, Seth B. Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis. United States: N. p., 2011. Web. doi:10.1021/jp205532e.
Tseng, Yu-Chih, Peng, Qing, Ocola, Leonidas E., Elam, Jeffrey W., & Darling, Seth B. Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis. United States. doi:10.1021/jp205532e.
Tseng, Yu-Chih, Peng, Qing, Ocola, Leonidas E., Elam, Jeffrey W., and Darling, Seth B. Thu . "Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis". United States. doi:10.1021/jp205532e.
@article{osti_1387739,
title = {Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis},
author = {Tseng, Yu-Chih and Peng, Qing and Ocola, Leonidas E. and Elam, Jeffrey W. and Darling, Seth B.},
abstractNote = {},
doi = {10.1021/jp205532e},
journal = {Journal of Physical Chemistry. C},
issn = {1932-7447},
number = 36,
volume = 115,
place = {United States},
year = {2011},
month = {9}
}