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Title: Characterization of ion-induced radiation effects in nuclear materials using synchrotron x-ray techniques

Abstract

Abstract

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Materials Science of Actinides (MSA)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1386606
DOE Contract Number:
SC0001089
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Materials Research; Journal Volume: 30; Journal Issue: 09; Related Information: MSA partners with University of Notre Dame (lead); University of California, Davis; Florida State University; George Washington University; University of Michigan; University of Minnesota; Oak Ridge National Laboratory; Oregon state University; Rensselaer Polytechnic Institute; Savannah River National Laboratory
Country of Publication:
United States
Language:
English
Subject:
nuclear (including radiation effects), materials and chemistry by design, synthesis (novel materials), synthesis (self-assembly)

Citation Formats

Lang, Maik, Tracy, Cameron L., Palomares, Raul I., Zhang, Fuxiang, Severin, Daniel, Bender, Markus, Trautmann, Christina, Park, Changyong, Prakapenka, Vitali B., Skuratov, Vladimir A., and Ewing, Rodney C.. Characterization of ion-induced radiation effects in nuclear materials using synchrotron x-ray techniques. United States: N. p., 2015. Web. doi:10.1557/jmr.2015.6.
Lang, Maik, Tracy, Cameron L., Palomares, Raul I., Zhang, Fuxiang, Severin, Daniel, Bender, Markus, Trautmann, Christina, Park, Changyong, Prakapenka, Vitali B., Skuratov, Vladimir A., & Ewing, Rodney C.. Characterization of ion-induced radiation effects in nuclear materials using synchrotron x-ray techniques. United States. doi:10.1557/jmr.2015.6.
Lang, Maik, Tracy, Cameron L., Palomares, Raul I., Zhang, Fuxiang, Severin, Daniel, Bender, Markus, Trautmann, Christina, Park, Changyong, Prakapenka, Vitali B., Skuratov, Vladimir A., and Ewing, Rodney C.. 2015. "Characterization of ion-induced radiation effects in nuclear materials using synchrotron x-ray techniques". United States. doi:10.1557/jmr.2015.6.
@article{osti_1386606,
title = {Characterization of ion-induced radiation effects in nuclear materials using synchrotron x-ray techniques},
author = {Lang, Maik and Tracy, Cameron L. and Palomares, Raul I. and Zhang, Fuxiang and Severin, Daniel and Bender, Markus and Trautmann, Christina and Park, Changyong and Prakapenka, Vitali B. and Skuratov, Vladimir A. and Ewing, Rodney C.},
abstractNote = {Abstract},
doi = {10.1557/jmr.2015.6},
journal = {Journal of Materials Research},
number = 09,
volume = 30,
place = {United States},
year = 2015,
month = 5
}
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  • Future nanoelectronics manufacturing at extraordinary length scales, new device structures, and advanced materials will provide challenges to process development and engineering but also to process control and physical failure analysis. Advanced X-ray techniques, using lab systems and synchrotron radiation sources, will play a key role for the characterization of thin films, nanostructures, surfaces, and interfaces. The development of advanced X-ray techniques and tools will reduce risk and time for the introduction of new technologies. Eventually, time-to-market for new products will be reduced by the timely implementation of the best techniques for process development and process control. The development and usemore » of advanced methods at synchrotron radiation sources will be increasingly important, particularly for research and development in the field of advanced processes and new materials but also for the development of new X-ray components and procedures. The application of advanced X-ray techniques, in-line, in out-of-fab analytical labs and at synchrotron radiation sources, for research, development, and manufacturing in the nanoelectronics industry is reviewed. The focus of this paper is on the study of nanoscale device and on-chip interconnect materials, and materials for 3D IC integration as well.« less
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