Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.; Elam, Jeffrey W.

doi:10.1002/adma.201002465

Title: Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

Journal Article · Wed Sep 08 00:00:00 EDT 2010 · Advanced Materials

DOI:https://doi.org/10.1002/adma.201002465· OSTI ID:1386127

Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.; Elam, Jeffrey W.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Argonne-Northwestern Solar Energy Research Center (ANSER)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

DOE Contract Number:: SC0001059

OSTI ID:: 1386127

Journal Information:: Advanced Materials, Vol. 22, Issue 45; Related Information: ANSER partners with Northwestern University (lead); Argonne National Laboratory; University of Chicago; University of Illinois, Urbana-Champaign; Yale University; ISSN 0935-9648

Publisher:: Wiley

Country of Publication:: United States

Language:: English

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