skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Anatase and rutile TiO 2 films deposited by arc-free deep oscillation magnetron sputtering

Journal Article · · Journal of Physics. D, Applied Physics

Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Center for Materials Science of Nuclear Fuel (CMSNF)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
AC07-05ID14517
OSTI ID:
1383587
Journal Information:
Journal of Physics. D, Applied Physics, Vol. 46, Issue 8; Related Information: CMSNF partners with Idaho National Laboratory (lead); Colorado School of Mines; University of Florida; Oak Ridge National Laboratory; Purdue University; University of Wisconsin at Madison; ISSN 0022-3727
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English

Similar Records

Anatase and rutile TiO2 films deposited by arc-free deep oscillation magnetron sputtering
Journal Article · Fri Feb 01 00:00:00 EST 2013 · Journal of Physics D: Applied Physics · OSTI ID:1383587

High rate deposition of photocatalytic TiO{sub 2} films by dc magnetron sputtering using a TiO{sub 2-x} target
Journal Article · Tue Jul 15 00:00:00 EDT 2008 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films · OSTI ID:1383587

Electrical and optical properties of Nb-doped TiO{sub 2} films deposited by dc magnetron sputtering using slightly reduced Nb-doped TiO{sub 2-x} ceramic targets
Journal Article · Thu Jul 15 00:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films · OSTI ID:1383587