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Title: Observing the Nucleation Phase of Atomic Layer Deposition In Situ

Authors:
; ; ; ;  [1];
  1. Honda Research Institute USA, Mountain View, California 94043, United States
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Center on Nanostructuring for Efficient Energy Conversion (CNEEC)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1382988
DOE Contract Number:  
SC0001060
Resource Type:
Journal Article
Journal Name:
Chemistry of Materials
Additional Journal Information:
Journal Volume: 24; Journal Issue: 22; Related Information: CNEEC partners with Stanford University (lead); Carnegie Institution at Stanford; Technical University of Denmark; Journal ID: ISSN 0897-4756
Publisher:
American Chemical Society (ACS)
Country of Publication:
United States
Language:
English
Subject:
catalysis (heterogeneous), solar (fuels), photosynthesis (natural and artificial), bio-inspired, electrodes - solar, defects, charge transport, materials and chemistry by design, synthesis (novel materials)

Citation Formats

Mack, James F., Van Stockum, Philip B., Yemane, Yonas T., Logar, Manca, Iwadate, Hitoshi, and Prinz, Fritz B. Observing the Nucleation Phase of Atomic Layer Deposition In Situ. United States: N. p., 2012. Web. doi:10.1021/cm302398v.
Mack, James F., Van Stockum, Philip B., Yemane, Yonas T., Logar, Manca, Iwadate, Hitoshi, & Prinz, Fritz B. Observing the Nucleation Phase of Atomic Layer Deposition In Situ. United States. doi:10.1021/cm302398v.
Mack, James F., Van Stockum, Philip B., Yemane, Yonas T., Logar, Manca, Iwadate, Hitoshi, and Prinz, Fritz B. Mon . "Observing the Nucleation Phase of Atomic Layer Deposition In Situ". United States. doi:10.1021/cm302398v.
@article{osti_1382988,
title = {Observing the Nucleation Phase of Atomic Layer Deposition In Situ},
author = {Mack, James F. and Van Stockum, Philip B. and Yemane, Yonas T. and Logar, Manca and Iwadate, Hitoshi and Prinz, Fritz B.},
abstractNote = {},
doi = {10.1021/cm302398v},
journal = {Chemistry of Materials},
issn = {0897-4756},
number = 22,
volume = 24,
place = {United States},
year = {2012},
month = {10}
}