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Title: Observing the Nucleation Phase of Atomic Layer Deposition In Situ

Journal Article · · Chemistry of Materials
DOI:https://doi.org/10.1021/cm302398v· OSTI ID:1382988
; ; ; ;  [1];
  1. Honda Research Institute USA, Mountain View, California 94043, United States

Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Center on Nanostructuring for Efficient Energy Conversion (CNEEC)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
SC0001060
OSTI ID:
1382988
Journal Information:
Chemistry of Materials, Vol. 24, Issue 22; Related Information: CNEEC partners with Stanford University (lead); Carnegie Institution at Stanford; Technical University of Denmark; ISSN 0897-4756
Publisher:
American Chemical Society (ACS)
Country of Publication:
United States
Language:
English