Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

Banerjee, Parag; Lee, Won-Jae; Bae, Ki-Ryeol; Lee, Sang Bok; Rubloff, Gary W.

doi:10.1063/1.3466987

Title: Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

Journal Article · Sun Aug 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3466987· OSTI ID:1382621

Banerjee, Parag; Lee, Won-Jae; Bae, Ki-Ryeol; Lee, Sang Bok; Rubloff, Gary W.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Nanostructures for Electrical Energy Storage (NEES)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

DOE Contract Number:: SC0001160

OSTI ID:: 1382621

Journal Information:: Journal of Applied Physics, Vol. 108, Issue 4; Related Information: NEES partners with University of Maryland (lead); University of California, Irvine; University of Florida; Los Alamos National Laboratory; Sandia National Laboratories; Yale University; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

References (17)

The role of oxygen vacancies in epitaxial-deposited ZnO thin films Shan, F. K.; Liu, G. X.; Lee, W. J. Journal of Applied Physics, Vol. 101, Issue 5 https://doi.org/10.1063/1.2437122	journal	March 2007
Band-gap narrowing in heavily doped many-valley semiconductors Berggren, K. -F.; Sernelius, B. E. Physical Review B, Vol. 24, Issue 4 https://doi.org/10.1103/PhysRevB.24.1971	journal	August 1981
The Interpretation of the Properties of Indium Antimonide Moss, T. S. Proceedings of the Physical Society. Section B, Vol. 67, Issue 10 https://doi.org/10.1088/0370-1301/67/10/306	journal	October 1954
Extremely low temperature growth of ZnO by atomic layer deposition Guziewicz, E.; Kowalik, I. A.; Godlewski, M. Journal of Applied Physics, Vol. 103, Issue 3 https://doi.org/10.1063/1.2836819	journal	February 2008
Growth of ZnO/Al₂O₃ Alloy Films Using Atomic Layer Deposition Techniques Elam, J. W.; George, S. M. Chemistry of Materials, Vol. 15, Issue 4 https://doi.org/10.1021/cm020607+	journal	February 2003
Properties of ZnO/Al[sub 2]O[sub 3] Alloy Films Grown Using Atomic Layer Deposition Techniques Elam, J. W.; Routkevitch, D.; George, S. M. Journal of The Electrochemical Society, Vol. 150, Issue 6 https://doi.org/10.1149/1.1569481	journal	January 2003
Anomalous Optical Absorption Limit in InSb Burstein, Elias Physical Review, Vol. 93, Issue 3 https://doi.org/10.1103/PhysRev.93.632	journal	February 1954
Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry Yousfi, El Bekkaye; Fouache, Jacques; Lincot, Daniel Applied Surface Science, Vol. 153, Issue 4, p. 223-234 https://doi.org/10.1016/S0169-4332(99)00330-X	journal	January 2000
Structural, optical, and electrical properties of (Zn,Al)O films over a wide range of compositions Lu, J. G.; Ye, Z. Z.; Zeng, Y. J. Journal of Applied Physics, Vol. 100, Issue 7 https://doi.org/10.1063/1.2357638	journal	October 2006
Effect of high substrate temperature on Al-doped ZnO thin films grown by pulsed laser deposition Mass, J.; Bhattacharya, P.; Katiyar, R. S. Materials Science and Engineering: B, Vol. 103, Issue 1 https://doi.org/10.1016/S0921-5107(03)00127-2	journal	September 2003
High-κ gate dielectrics: Current status and materials properties considerations Wilk, G. D.; Wallace, R. M.; Anthony, J. M. Journal of Applied Physics, Vol. 89, Issue 10 https://doi.org/10.1063/1.1361065	journal	May 2001
Carrier concentration dependence of band gap shift in n-type ZnO:Al films Lu, J. G.; Fujita, S.; Kawaharamura, T. Journal of Applied Physics, Vol. 101, Issue 8 https://doi.org/10.1063/1.2721374	journal	April 2007
Surface Chemistry for Atomic Layer Growth George, S. M.; Ott, A. W.; Klaus, J. W. The Journal of Physical Chemistry, Vol. 100, Issue 31, p. 13121-13131 https://doi.org/10.1021/jp9536763	journal	January 1996
Preferential growth of ZnO thin films by the atomic layer deposition technique Pung, Swee-Yong; Choy, Kwang-Leong; Hou, Xianghui Nanotechnology, Vol. 19, Issue 43 https://doi.org/10.1088/0957-4484/19/43/435609	journal	September 2008
Atomic structures of supersaturated ZnO–Al2O3 solid solutions Yoshioka, Satoru; Oba, Fumiyasu; Huang, Rong Journal of Applied Physics, Vol. 103, Issue 1 https://doi.org/10.1063/1.2829785	journal	January 2008
Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering Minami, Tadatsugu; Nanto, Hidehito; Takata, Shinzo Japanese Journal of Applied Physics, Vol. 23, Issue Part 2, No. 1 https://doi.org/10.1143/JJAP.23.L280	journal	May 1984
ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements Elam, J. W.; Sechrist, Z. A.; George, S. M. Thin Solid Films, Vol. 414, Issue 1 https://doi.org/10.1016/S0040-6090(02)00427-3	journal	July 2002

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