The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition

Meyer, J.; Schmidt, H.; Kowalsky, W.; Riedl, T.; Kahn, A.

doi:10.1063/1.3455324

Title: The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition

Journal Article · Mon Jun 14 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3455324· OSTI ID:1382002

Meyer, J.; Schmidt, H.; Kowalsky, W.; Riedl, T.; Kahn, A.

Cite

Export

Save

Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Center for Interface Science: Solar Electric Materials (CISSEM)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

DOE Contract Number:: SC0001084

OSTI ID:: 1382002

Journal Information:: Applied Physics Letters, Vol. 96, Issue 24; Related Information: CISSEM partners with the University of Arizona (lead); Georgia Institute of Technology; National Renewable Energy Laboratory; Princeton University; University of Washington; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

References (15)

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process Puurunen, Riikka L. Journal of Applied Physics, Vol. 97, Issue 12, Article No. 121301 https://doi.org/10.1063/1.1940727	journal	June 2005
The diffusion of oxygen in Zirconia as a function of oxygen pressure Keneshea, F. J.; Douglass, D. L. Oxidation of Metals, Vol. 3, Issue 1 https://doi.org/10.1007/BF00604736	journal	January 1971
Defect-permeation correlation for ultrathin transparent barrier coatings on polymers da Silva Sobrinho, A. S.; Czeremuszkin, G.; Latrèche, M. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 18, Issue 1 https://doi.org/10.1116/1.582156	journal	January 2000
Thin film atomic layer deposition equipment for semiconductor processing Sneh, Ofer; Clark-Phelps, Robert B.; Londergan, Ana R. Thin Solid Films, Vol. 402, Issue 1-2 https://doi.org/10.1016/S0040-6090(01)01678-9	journal	January 2002
Intercomparison of surface analysis of thin aluminium oxide films Olefjord, I.; Mathieu, H. J.; Marcus, P. Surface and Interface Analysis, Vol. 15, Issue 11 https://doi.org/10.1002/sia.740151108	journal	November 1990
Permeation rate measurements by electrical analysis of calcium corrosion Paetzold, R.; Winnacker, A.; Henseler, D. Review of Scientific Instruments, Vol. 74, Issue 12 https://doi.org/10.1063/1.1626015	journal	December 2003
Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications Niinistö, Lauri; Ritala, Mikko; Leskelä, Markku Materials Science and Engineering: B, Vol. 41, Issue 1 https://doi.org/10.1016/S0921-5107(96)01617-0	journal	October 1996
Reliability and degradation of organic light emitting devices Burrows, P. E.; Bulovic, V.; Forrest, S. R. Applied Physics Letters, Vol. 65, Issue 23 https://doi.org/10.1063/1.112532	journal	December 1994
Gas permeation and lifetime tests on polymer-based barrier coatings Burrows, Paul E.; Graff, Gordon L.; Gross, Mark E. International Symposium on Optical Science and Technology, SPIE Proceedings https://doi.org/10.1117/12.416878	conference	February 2001
Low-Temperature Al₂O₃ Atomic Layer Deposition Groner, M. D.; Fabreguette, F. H.; Elam, J. W. Chemistry of Materials, Vol. 16, Issue 4, p. 639-645 https://doi.org/10.1021/cm0304546	journal	February 2004
An XPS study of hydrogen implanted zirconium Sinha, S.; Badrinarayanan, S.; Sinha, A. P. B. Journal of the Less Common Metals, Vol. 134, Issue 2 https://doi.org/10.1016/0022-5088(87)90562-5	journal	September 1987
Miscibility of amorphous ZrO2–Al2O3 binary alloy Zhao, C.; Richard, O.; Bender, H. Applied Physics Letters, Vol. 80, Issue 13 https://doi.org/10.1063/1.1459765	journal	April 2002
Al ₂ O ₃ /ZrO ₂ Nanolaminates as Ultrahigh Gas-Diffusion Barriers-A Strategy for Reliable Encapsulation of Organic Electronics Meyer, Jens; Görrn, Patrick; Bertram, Franz Advanced Materials, Vol. 21, Issue 18 https://doi.org/10.1002/adma.200803440	journal	May 2009
Reliable thin film encapsulation for organic light emitting diodes grown by low-temperature atomic layer deposition Meyer, J.; Schneidenbach, D.; Winkler, T. Applied Physics Letters, Vol. 94, Issue 23 https://doi.org/10.1063/1.3153123	journal	June 2009
Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al₂O₃ and Rapid SiO₂ Atomic Layer Deposition Dameron, Arrelaine A.; Davidson, Stephen D.; Burton, Beau B. The Journal of Physical Chemistry C, Vol. 112, Issue 12 https://doi.org/10.1021/jp076866+	journal	March 2008

Similar Records

The origin of low water vapor transmission rates through Al₂O₃/ZrO₂ nanolaminate gas-diffusion barriers grown by atomic layer deposition

Journal Article · Fri Jan 01 00:00:00 EST 2010 · Applied Physics Letters · OSTI ID:1382002

Meyer, Jens; Schmidt, H.; Kowalsky, W.; +2 more

Long-term stable water vapor permeation barrier properties of SiN/SiCN/SiN nanolaminated multilayers grown by plasma-enhanced chemical vapor deposition at extremely low pressures

Journal Article · Mon Aug 04 00:00:00 EDT 2014 · Applied Physics Letters · OSTI ID:1382002

Lee, Jong Ho

Inverted organic solar cells with ITO electrodes modified with an ultrathin Al2O3 buffer layer deposited by atomic layer deposition

Journal Article · Fri Jan 01 00:00:00 EST 2010 · Journal of Materials Chemistry · OSTI ID:1382002

Zhou, Yinhua; Cheun, Hyeunseok; Potscavage, Jr, Willliam J.; +3 more

Related Subjects

solar (photovoltaic)
electrodes - solar
charge transport
synthesis (novel materials)
synthesis (self-assembly)
synthesis (scalable processing)

Title: The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition

Citation Formats

References (15)

Similar Records

Related Subjects