Campanile Near-Field Probes Fabricated by Nanoimprint Lithography on the Facet of an Optical Fiber

Calafiore, Giuseppe; Koshelev, Alexander; Darlington, Thomas P.; Borys, Nicholas J.; Melli, Mauro; Polyakov, Aleksandr; Cantarella, Giuseppe; Allen, Frances I.; Lum, Paul; Wong, Ed; Sassolini, Simone; Weber-Bargioni, Alexander; Schuck, P. James; Cabrini, Stefano; Munechika, Keiko

doi:10.1038/s41598-017-01871-5

Title: Campanile Near-Field Probes Fabricated by Nanoimprint Lithography on the Facet of an Optical Fiber

Journal Article · Wed May 10 00:00:00 EDT 2017 · Scientific Reports

DOI:https://doi.org/10.1038/s41598-017-01871-5· OSTI ID:1379938

Calafiore, Giuseppe ^[1];

^[1]; Darlington, Thomas P. ^[2]; Borys, Nicholas J. ^[2]; Melli, Mauro ^[2]; Polyakov, Aleksandr ^[2]; Cantarella, Giuseppe ^[2]; Allen, Frances I. ^[3]; Lum, Paul ^[4]; Wong, Ed ^[2]; Sassolini, Simone ^[2]; Weber-Bargioni, Alexander ^[2]; Schuck, P. James ^[2]; Cabrini, Stefano ^[2]; Munechika, Keiko ^[1]

aBeam Technologies, Hayward, CA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry; Univ. of California, Berkeley, CA (United States). Biomolecular Nanotechnology Center, Dept. of Materials Science and Engineering
Univ. of California, Berkeley, CA (United States). Biomolecular Nanotechnology Center

One of the major challenges to the widespread adoption of plasmonic and nano-optical devices in real-life applications is the difficulty to mass-fabricate nano-optical antennas in parallel and reproducible fashion, and the capability to precisely place nanoantennas into devices with nanometer-scale precision. In this study, we present a solution to this challenge using the state-of-the-art ultraviolet nanoimprint lithography (UV-NIL) to fabricate functional optical transformers onto the core of an optical fiber in a single step, mimicking the 'campanile' near-field probes. Imprinted probes were fabricated using a custom-built imprinter tool with co-axial alignment capability with sub < 100 nm position accuracy, followed by a metallization step. Scanning electron micrographs confirm high imprint fidelity and precision with a thin residual layer to facilitate efficient optical coupling between the fiber and the imprinted optical transformer. The imprinted optical transformer probe was used in an actual NSOM measurement performing hyperspectral photoluminescence mapping of standard fluorescent beads. The calibration scans confirmed that imprinted probes enable sub-diffraction limited imaging with a spatial resolution consistent with the gap size. This novel nano-fabrication approach promises a low-cost, high-throughput, and reproducible manufacturing of advanced nano-optical devices.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)

Grant/Contract Number:: AC02-05CH11231; C0013109; DMR-1338139

OSTI ID:: 1379938

Journal Information:: Scientific Reports, Vol. 7, Issue 1; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 21 works

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Field-enhanced nanofocusing of radially polarized light by a tapered hybrid plasmonic waveguide with periodic grooves Xu, Ji; Li, Kang; Zhang, Sicheng Applied Optics, Vol. 58, Issue 3 https://doi.org/10.1364/ao.58.000588	journal	January 2019
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