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Title: A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge

Authors:
 [1];  [2];  [2];  [2]; ORCiD logo [3]
  1. School of Physics, Dalian University of Technology, Dalian 116024, China, Department of Electrical Engineering and Computer Science-1770, University of California, Berkeley, California 94720, USA
  2. Department of Electrical Engineering and Computer Science-1770, University of California, Berkeley, California 94720, USA
  3. School of Physics, Dalian University of Technology, Dalian 116024, China
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1376737
Grant/Contract Number:
SC0001939
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 24; Journal Issue: 8; Related Information: CHORUS Timestamp: 2018-02-14 14:41:48; Journal ID: ISSN 1070-664X
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Wen, De-Qi, Kawamura, E., Lieberman, M. A., Lichtenberg, A. J., and Wang, You-Nian. A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge. United States: N. p., 2017. Web. doi:10.1063/1.4993798.
Wen, De-Qi, Kawamura, E., Lieberman, M. A., Lichtenberg, A. J., & Wang, You-Nian. A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge. United States. doi:10.1063/1.4993798.
Wen, De-Qi, Kawamura, E., Lieberman, M. A., Lichtenberg, A. J., and Wang, You-Nian. Tue . "A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge". United States. doi:10.1063/1.4993798.
@article{osti_1376737,
title = {A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge},
author = {Wen, De-Qi and Kawamura, E. and Lieberman, M. A. and Lichtenberg, A. J. and Wang, You-Nian},
abstractNote = {},
doi = {10.1063/1.4993798},
journal = {Physics of Plasmas},
number = 8,
volume = 24,
place = {United States},
year = {Tue Aug 01 00:00:00 EDT 2017},
month = {Tue Aug 01 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on August 24, 2018
Publisher's Accepted Manuscript

Citation Metrics:
Cited by: 1 work
Citation information provided by
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