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Title: Power measurements and coupler optimization in inductive discharges

Authors:
ORCiD logo [1];  [2]
  1. Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109, USA and RF Plasma Consulting, Brookline, Massachusetts 02446, USA
  2. Plasma Sensors, Brookline, Massachusetts 02446, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1375662
Grant/Contract Number:
SC0001939
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 88; Journal Issue: 8; Related Information: CHORUS Timestamp: 2018-02-14 12:32:37; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Godyak, V. A., and Alexandrovich, B. M. Power measurements and coupler optimization in inductive discharges. United States: N. p., 2017. Web. doi:10.1063/1.4995810.
Godyak, V. A., & Alexandrovich, B. M. Power measurements and coupler optimization in inductive discharges. United States. doi:10.1063/1.4995810.
Godyak, V. A., and Alexandrovich, B. M. Tue . "Power measurements and coupler optimization in inductive discharges". United States. doi:10.1063/1.4995810.
@article{osti_1375662,
title = {Power measurements and coupler optimization in inductive discharges},
author = {Godyak, V. A. and Alexandrovich, B. M.},
abstractNote = {},
doi = {10.1063/1.4995810},
journal = {Review of Scientific Instruments},
number = 8,
volume = 88,
place = {United States},
year = {Tue Aug 01 00:00:00 EDT 2017},
month = {Tue Aug 01 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on August 21, 2018
Publisher's Accepted Manuscript

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