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Title: Impact of laser anneal on NiPt silicide texture and chemical composition

Authors:
ORCiD logo [1];  [2];  [3]; ORCiD logo [4];  [4];  [4];  [4];  [4];  [5]
  1. STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France, Univ. Grenoble Alpes, CNRS, LTM, F-38000 Grenoble, France
  2. IBM, 850 rue Jean Monnet, 38926 Crolles Cedex, France
  3. IBM T. J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA
  4. STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France
  5. Univ. Grenoble Alpes, CNRS, LTM, F-38000 Grenoble, France
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1372507
Grant/Contract Number:  
AC02- 98CH10886
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Name: Journal of Applied Physics Journal Volume: 121 Journal Issue: 22; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Feautrier, C., Ozcan, A. S., Lavoie, C., Valery, A., Beneyton, R., Borowiak, C., Clément, L., Pofelski, A., and Salem, B.. Impact of laser anneal on NiPt silicide texture and chemical composition. United States: N. p., 2017. Web. doi:10.1063/1.4985279.
Feautrier, C., Ozcan, A. S., Lavoie, C., Valery, A., Beneyton, R., Borowiak, C., Clément, L., Pofelski, A., & Salem, B.. Impact of laser anneal on NiPt silicide texture and chemical composition. United States. doi:10.1063/1.4985279.
Feautrier, C., Ozcan, A. S., Lavoie, C., Valery, A., Beneyton, R., Borowiak, C., Clément, L., Pofelski, A., and Salem, B.. Wed . "Impact of laser anneal on NiPt silicide texture and chemical composition". United States. doi:10.1063/1.4985279.
@article{osti_1372507,
title = {Impact of laser anneal on NiPt silicide texture and chemical composition},
author = {Feautrier, C. and Ozcan, A. S. and Lavoie, C. and Valery, A. and Beneyton, R. and Borowiak, C. and Clément, L. and Pofelski, A. and Salem, B.},
abstractNote = {},
doi = {10.1063/1.4985279},
journal = {Journal of Applied Physics},
number = 22,
volume = 121,
place = {United States},
year = {Wed Jun 14 00:00:00 EDT 2017},
month = {Wed Jun 14 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1063/1.4985279

Citation Metrics:
Cited by: 3 works
Citation information provided by
Web of Science

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