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Title: Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity

Abstract

Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.

Authors:
 [1]
  1. Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
Publication Date:
Research Org.:
Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1372102
Alternate Identifier(s):
OSTI ID: 1361946
Grant/Contract Number:  
NA0001944
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 56; Journal Issue: 18; Journal ID: ISSN 0003-6935
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization

Citation Formats

Oliver, J. B. Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity. United States: N. p., 2017. Web. doi:10.1364/AO.56.005121.
Oliver, J. B. Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity. United States. doi:10.1364/AO.56.005121.
Oliver, J. B. Mon . "Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity". United States. doi:10.1364/AO.56.005121. https://www.osti.gov/servlets/purl/1372102.
@article{osti_1372102,
title = {Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity},
author = {Oliver, J. B.},
abstractNote = {Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.},
doi = {10.1364/AO.56.005121},
journal = {Applied Optics},
number = 18,
volume = 56,
place = {United States},
year = {Mon Jun 12 00:00:00 EDT 2017},
month = {Mon Jun 12 00:00:00 EDT 2017}
}

Journal Article:
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