Fabrication and performance of selectively oxidized vertical-cavity lasers
- Sandia National Labs., Albuquerque, NM (United States). Photonics Research Dept.
- Univ. of Virginia, Charlottesville, VA (United States). Dept. of Materials Science
The authors report the high yield fabrication and reproducible performance of selectivity oxidized vertical-cavity surface emitting lasers. They show that liner oxidation rates of AlGaAs without an induction period allows reproducible fabrication of buried oxide current apertures within monolithic distributed Bragg reflectors. The oxide layers do not induce obvious crystalline defects, and continuous wave operation in excess of 650 h has been obtained. The high yield fabrication enables relatively high laser performance over a wide wavelength span. They observe submilliamp threshold currents over a wavelength range of up to 75 nm, and power conversion efficiencies at 1 mW output power of greater than 20% over a 50-nm wavelength range.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 137061
- Journal Information:
- IEEE Photonics Technology Letters, Vol. 7, Issue 11; Other Information: PBD: Nov 1995
- Country of Publication:
- United States
- Language:
- English
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