Exploring Pore Formation of Atomic Layer-Deposited Overlayers by in Situ Small- and Wide-Angle X-ray Scattering

Journal Article · Tue Oct 11 00:00:00 EDT 2016 · Chemistry of Materials

DOI:https://doi.org/10.1021/acs.chemmater.6b03222· OSTI ID:1370188

Li, Tao; Karwal, Saurabh; Aoun, Bachir; Zhao, Haiyan; Ren, Yang; Canlas, Christian P.; Elam, Jeffrey W.; Winans, Randall E.

• Research Organization: Energy Frontier Research Centers (EFRC) (United States). Institute for Atom-efficient Chemical Transformations (IACT)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES)
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 1370188
• Journal Information: Chemistry of Materials, Vol. 28, Issue 19; Related Information: IACT partners with Argonne National Laboratory (lead); Brookhaven National Laboratory; Northwestern University; Purdue University; University of Wisconsin at Madison; ISSN 0897-4756
• Publisher: American Chemical Society (ACS)
• Country of Publication: United States
• Language: English