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Title: Underpotential deposition-mediated layer-by-layer growth of thin films

Abstract

A method of depositing contiguous, conformal submonolayer-to-multilayer thin films with atomic-level control is described. The process involves electrochemically exchanging a mediating element on a substrate with a noble metal film by alternatingly sweeping potential in forward and reverse directions for a predetermined number of times in an electrochemical cell. By cycling the applied voltage between the bulk deposition potential for the mediating element and the material to be deposited, repeated desorption/adsorption of the mediating element during each potential cycle can be used to precisely control film growth on a layer-by-layer basis.

Inventors:
;
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1366730
Patent Number(s):
9,689,085
Application Number:
14/689,708
Assignee:
Brookhaven Science Associates, LLC BNL
DOE Contract Number:  
AC02-98CH10886
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Apr 17
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Wang, Jia Xu, and Adzic, Radoslav R. Underpotential deposition-mediated layer-by-layer growth of thin films. United States: N. p., 2017. Web.
Wang, Jia Xu, & Adzic, Radoslav R. Underpotential deposition-mediated layer-by-layer growth of thin films. United States.
Wang, Jia Xu, and Adzic, Radoslav R. Tue . "Underpotential deposition-mediated layer-by-layer growth of thin films". United States. doi:. https://www.osti.gov/servlets/purl/1366730.
@article{osti_1366730,
title = {Underpotential deposition-mediated layer-by-layer growth of thin films},
author = {Wang, Jia Xu and Adzic, Radoslav R.},
abstractNote = {A method of depositing contiguous, conformal submonolayer-to-multilayer thin films with atomic-level control is described. The process involves electrochemically exchanging a mediating element on a substrate with a noble metal film by alternatingly sweeping potential in forward and reverse directions for a predetermined number of times in an electrochemical cell. By cycling the applied voltage between the bulk deposition potential for the mediating element and the material to be deposited, repeated desorption/adsorption of the mediating element during each potential cycle can be used to precisely control film growth on a layer-by-layer basis.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 27 00:00:00 EDT 2017},
month = {Tue Jun 27 00:00:00 EDT 2017}
}

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