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Title: Characterization of dielectric materials

Abstract

A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.

Inventors:
; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1366497
Patent Number(s):
9,689,822
Application Number:
14/602,370
Assignee:
UT-Battelle, LLC ORNL
DOE Contract Number:
AC05-00OR22725
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jan 15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

King, Danny J., Babinec, Susan, Hagans, Patrick L., Maxey, Lonnie C., Payzant, Edward A., Daniel, Claus, Sabau, Adrian S., Dinwiddie, Ralph B., Armstrong, Beth L., Howe, Jane Y., Wood, III, David L., and Nembhard, Nicole S. Characterization of dielectric materials. United States: N. p., 2017. Web.
King, Danny J., Babinec, Susan, Hagans, Patrick L., Maxey, Lonnie C., Payzant, Edward A., Daniel, Claus, Sabau, Adrian S., Dinwiddie, Ralph B., Armstrong, Beth L., Howe, Jane Y., Wood, III, David L., & Nembhard, Nicole S. Characterization of dielectric materials. United States.
King, Danny J., Babinec, Susan, Hagans, Patrick L., Maxey, Lonnie C., Payzant, Edward A., Daniel, Claus, Sabau, Adrian S., Dinwiddie, Ralph B., Armstrong, Beth L., Howe, Jane Y., Wood, III, David L., and Nembhard, Nicole S. Tue . "Characterization of dielectric materials". United States. doi:. https://www.osti.gov/servlets/purl/1366497.
@article{osti_1366497,
title = {Characterization of dielectric materials},
author = {King, Danny J. and Babinec, Susan and Hagans, Patrick L. and Maxey, Lonnie C. and Payzant, Edward A. and Daniel, Claus and Sabau, Adrian S. and Dinwiddie, Ralph B. and Armstrong, Beth L. and Howe, Jane Y. and Wood, III, David L. and Nembhard, Nicole S.},
abstractNote = {A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 27 00:00:00 EDT 2017},
month = {Tue Jun 27 00:00:00 EDT 2017}
}

Patent:

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