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Selective nanoscale growth of lattice mismatched materials

Patent ·
OSTI ID:1364428

Exemplary embodiments provide materials and methods of forming high-quality semiconductor devices using lattice-mismatched materials. In one embodiment, a composite film including one or more substantially-single-particle-thick nanoparticle layers can be deposited over a substrate as a nanoscale selective growth mask for epitaxially growing lattice-mismatched materials over the substrate.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
Assignee:
STC.UNM
Patent Number(s):
9,685,324
Application Number:
14/610,254
OSTI ID:
1364428
Country of Publication:
United States
Language:
English

References (4)

Effect Of Mg, Zn, Si, And O On The Lattice Constant of Gallium Nitride Thin Films journal January 1997
Strain-relieved, dislocation-free InxGa1−xAs∕GaAs(001) heterostructure by nanoscale-patterned growth journal November 2004
Lithography-free Nanoscale Patterned Growth of GaAs on Si(001) with Sub-100-nm Silica Nanoparticles by Molecular Beam Epitaxy journal September 2011
New approach to the high quality epitaxial growth of lattice‐mismatched materials journal July 1986

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