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Title: Frequency and amplitude stabilization in MEMS and NEMS oscillators

Patent ·
OSTI ID:1363750

This invention comprises a nonlinear micro- and nano-mechanical resonator that can maintain frequency of operation and amplitude of operation for a period of time after all external power has been removed from the device. Utilizing specific nonlinear dynamics of the micromechanical resonator, mechanical energy at low frequencies can be input and stored in higher frequencies modes, thus using the multiple degrees of freedom of the resonator to extend its energy storage capacity. Furthermore, the energy stored in multiple vibrational modes can be used to maintain the resonator oscillating for a fixed period of time, even without an external power supply. This is the first demonstration of an "autonomous" frequency source that can maintain a constant frequency and vibrating amplitude when no external power is provided, making it ideal for applications requiring an oscillator in low power, or limited and intermittent power supplies.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UCHICAGO ARGONNE, LLC
Patent Number(s):
9,680,414
Application Number:
15/042,912
OSTI ID:
1363750
Resource Relation:
Patent File Date: 2016 Feb 12
Country of Publication:
United States
Language:
English

References (8)

Microelectromechanical system artificial neural network device patent July 2004
Detection of resonator motion using piezoresistive signal downmixing patent June 2009
Nanomechanical oscillator patent November 2011
Frequency stabilization in nonlinear MEMS and NEMS oscillators patent September 2014
Compensation of changes in MEMS capacitive transduction patent April 2015
Average controlled (AC) resonator driver patent-application March 2006
ROTATIONAL MEMS RESONATOR FOR OSCILLATOR APPLICATIONS patent-application September 2014
MICROELECTROMECHANICAL SYSTEM AND METHODS OF USE patent-application June 2015

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