skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Activation, stabilization degradation, and lifetime predictions of refractory thin films emitters operated in cold cathode magnetrons

Abstract

Qualitative physical and chemical analysis of cold cathode magnetrons, field emitter activation process, and emission stabilizaiton is describewd. The field emitter materials being presented are super thin films of Ta, Nb, W and their alloys and secondary electron emitters being presented by different kinds of emission active materials. Degradation processes of cold cathode magnetrons with field electron excitation are studied. Criteria for predicting of long (>10,000 h) life, including individual life predictions are defined. Parameters of the lowest voltage state-of-the-art cold cathode mangetron with 7.5 and 5 kW pulse output power in 3 cm wavelength range are tabulated. 4 refs., 4 figs., 1 tab.

Authors:
 [1]
  1. Pluton Co., Inc., Moscow (Russian Federation)
Publication Date:
OSTI Identifier:
136247
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
Additional Journal Information:
Journal Volume: 12; Journal Issue: 2; Other Information: PBD: Mar-Apr 1994
Country of Publication:
United States
Language:
English
Subject:
66 PHYSICS; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; MAGNETRONS; CATHODES; FIELD EMISSION; SERVICE LIFE; THIN FILMS; STABILIZATION

Citation Formats

Kopylov, M.F. Activation, stabilization degradation, and lifetime predictions of refractory thin films emitters operated in cold cathode magnetrons. United States: N. p., 1994. Web. doi:10.1116/1.587374.
Kopylov, M.F. Activation, stabilization degradation, and lifetime predictions of refractory thin films emitters operated in cold cathode magnetrons. United States. doi:10.1116/1.587374.
Kopylov, M.F. Tue . "Activation, stabilization degradation, and lifetime predictions of refractory thin films emitters operated in cold cathode magnetrons". United States. doi:10.1116/1.587374.
@article{osti_136247,
title = {Activation, stabilization degradation, and lifetime predictions of refractory thin films emitters operated in cold cathode magnetrons},
author = {Kopylov, M.F.},
abstractNote = {Qualitative physical and chemical analysis of cold cathode magnetrons, field emitter activation process, and emission stabilizaiton is describewd. The field emitter materials being presented are super thin films of Ta, Nb, W and their alloys and secondary electron emitters being presented by different kinds of emission active materials. Degradation processes of cold cathode magnetrons with field electron excitation are studied. Criteria for predicting of long (>10,000 h) life, including individual life predictions are defined. Parameters of the lowest voltage state-of-the-art cold cathode mangetron with 7.5 and 5 kW pulse output power in 3 cm wavelength range are tabulated. 4 refs., 4 figs., 1 tab.},
doi = {10.1116/1.587374},
journal = {Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena},
number = 2,
volume = 12,
place = {United States},
year = {1994},
month = {3}
}