Space-charge effects in Spindt-type field emission cathodes

Journal Article · Tue Mar 01 00:00:00 EST 1994 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.587407· OSTI ID:136246

van Veen, G N.A. ^[1]

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1. Philips Research Labs., Eindhoven (Netherlands)

The field emission characteristic of a Spindt-type cathode, cleaned extensively in a hydrogen atmosphere while emitting, is considered. The maximum emission reached is about 800 {mu}A. At high current levels the I-V curve clearly deviates from a Fowler-Nordheim behavior. This can be explained by the occurrence of space charge. Several models are considered to simulate the experimental results. The fit to the data is good except at the highest emission levels. In this region the difference between the measured currents and the simulation results is due to the neglect of the variation of the field on top of the tip in the presence of space charge. 15 refs., 14 figs.

• OSTI ID: 136246
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 12, Issue 2; Other Information: PBD: Mar-Apr 1994
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
FIELD EMISSION
SPACE CHARGE
CATHODES
CURRENT DENSITY