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Title: Review Article: Reactions of fluorine atoms with silicon, revisited, again

Authors:
 [1]
  1. Department of Chemical and Biomolecular Engineering, University of Houston, Engineering Bldg. D, 4800 Calhoun Rd., Houston, Texas 77204
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1361942
Alternate Identifier(s):
OSTI ID: 1420717
Grant/Contract Number:
SC0001319; DESC0001319
Resource Type:
Journal Article: Published Article
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 5; Related Information: CHORUS Timestamp: 2017-06-08 13:18:10; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Donnelly, Vincent M. Review Article: Reactions of fluorine atoms with silicon, revisited, again. United States: N. p., 2017. Web. doi:10.1116/1.4983922.
Donnelly, Vincent M. Review Article: Reactions of fluorine atoms with silicon, revisited, again. United States. doi:10.1116/1.4983922.
Donnelly, Vincent M. Wed . "Review Article: Reactions of fluorine atoms with silicon, revisited, again". United States. doi:10.1116/1.4983922.
@article{osti_1361942,
title = {Review Article: Reactions of fluorine atoms with silicon, revisited, again},
author = {Donnelly, Vincent M.},
abstractNote = {},
doi = {10.1116/1.4983922},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 5,
volume = 35,
place = {United States},
year = {Wed May 31 00:00:00 EDT 2017},
month = {Wed May 31 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1116/1.4983922

Citation Metrics:
Cited by: 2works
Citation information provided by
Web of Science

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