skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

Authors:
 [1];  [1];  [1];  [2];  [2]
  1. Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996
  2. Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996 and Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1361941
Alternate Identifier(s):
OSTI ID: 1420590
Grant/Contract Number:
DOE DE-SC0002136
Resource Type:
Journal Article: Published Article
Journal Name:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Additional Journal Information:
Journal Volume: 35; Journal Issue: 3; Related Information: CHORUS Timestamp: 2017-06-08 13:01:59; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Stanford, Michael G., Lewis, Brett B., Mahady, Kyle, Fowlkes, Jason D., and Rack, Philip D. Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams. United States: N. p., 2017. Web. doi:10.1116/1.4981016.
Stanford, Michael G., Lewis, Brett B., Mahady, Kyle, Fowlkes, Jason D., & Rack, Philip D. Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams. United States. doi:10.1116/1.4981016.
Stanford, Michael G., Lewis, Brett B., Mahady, Kyle, Fowlkes, Jason D., and Rack, Philip D. Thu . "Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams". United States. doi:10.1116/1.4981016.
@article{osti_1361941,
title = {Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams},
author = {Stanford, Michael G. and Lewis, Brett B. and Mahady, Kyle and Fowlkes, Jason D. and Rack, Philip D.},
abstractNote = {},
doi = {10.1116/1.4981016},
journal = {Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},
number = 3,
volume = 35,
place = {United States},
year = {Thu Apr 20 00:00:00 EDT 2017},
month = {Thu Apr 20 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1116/1.4981016

Citation Metrics:
Cited by: 1work
Citation information provided by
Web of Science

Save / Share: