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Title: The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials

Authors:
 [1];  [1];  [2];  [1]
  1. The Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  2. Center for X-Ray Optics (CXRO), Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1361838
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Chemical Physics
Additional Journal Information:
Journal Volume: 146; Journal Issue: 16; Related Information: CHORUS Timestamp: 2018-02-14 15:41:15; Journal ID: ISSN 0021-9606
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Closser, Kristina D., Ogletree, D. Frank, Naulleau, Patrick, and Prendergast, David. The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials. United States: N. p., 2017. Web. doi:10.1063/1.4981815.
Closser, Kristina D., Ogletree, D. Frank, Naulleau, Patrick, & Prendergast, David. The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials. United States. doi:10.1063/1.4981815.
Closser, Kristina D., Ogletree, D. Frank, Naulleau, Patrick, and Prendergast, David. Fri . "The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials". United States. doi:10.1063/1.4981815.
@article{osti_1361838,
title = {The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials},
author = {Closser, Kristina D. and Ogletree, D. Frank and Naulleau, Patrick and Prendergast, David},
abstractNote = {},
doi = {10.1063/1.4981815},
journal = {Journal of Chemical Physics},
number = 16,
volume = 146,
place = {United States},
year = {Fri Apr 28 00:00:00 EDT 2017},
month = {Fri Apr 28 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1063/1.4981815

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