Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing

Journal Article · Wed Feb 22 00:00:00 EST 2017 · IEEE Transactions on Applied Superconductivity

DOI:https://doi.org/10.1109/TASC.2017.2672719· OSTI ID:1356209

Lewis, Rupert M.  ^[1]; Henry, Michael David ^[1]; Schroeder, Katlin ^[1]

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1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

We demonstrate vacuum gap λ/2 microwave resonators as a route toward higher integration in superconducting qubit circuits. The resonators are fabricated from pieces on two silicon chips bonded together with an In-Sb bond. Measurements of the devices yield resonant frequencies in good agreement with simulations. Furthermore, we discuss creating low loss circuits in this geometry.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• Grant/Contract Number: AC04-94AL85000
• OSTI ID: 1356209
• Report Number(s): SAND2017-1982J; 651397; TRN: US1702154
• Journal Information: IEEE Transactions on Applied Superconductivity, Vol. 27, Issue 4; ISSN 1051-8223
• Publisher: Institute of Electrical and Electronics Engineers (IEEE)
• Country of Publication: United States
• Language: English

Related Subjects

97 MATHEMATICS AND COMPUTING
dielectric losses
flip-chip devices
quantum computing
wafer scale integration