Plasma-initiated rehydrogenation of amorphous silicon to increase the temperature processing window of silicon heterojunction solar cells
- Arizona State Univ., Tempe, AZ (United States)
The dehydrogenation of intrinsic hydrogenated amorphous silicon (a-Si:H) at temperatures above approximately 300°C degrades its ability to passivate silicon wafer surfaces. This limits the temperature of post-passivation processing steps during the fabrication of advanced silicon heterojunction or silicon-based tandem solar cells. We demonstrate that a hydrogen plasma can rehydrogenate intrinsic a-Si:H passivation layers that have been dehydrogenated by annealing. The hydrogen plasma treatment fully restores the effective carrier lifetime to several milliseconds in textured crystalline siliconwafers coated with 8-nm-thick intrinsic a-Si:H layers after annealing at temperatures of up to 450°C. Plasma-initiated rehydrogenation also translates to complete solar cells: A silicon heterojunction solar cell subjected to annealing at 450°C (following intrinsic a-Si:H deposition) had an open-circuit voltage of less than 600 mV, but an identical cell that received hydrogen plasma treatment reached a voltage of over 710 mV and an efficiency of over 19%.
- Research Organization:
- Arizona State Univ., Tempe, AZ (United States)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE)
- Grant/Contract Number:
- EE0006335
- OSTI ID:
- 1354913
- Alternate ID(s):
- OSTI ID: 1264787; OSTI ID: 1354908; OSTI ID: 1354911
- Journal Information:
- Applied Physics Letters, Vol. 109, Issue 3; ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Web of Science
Defect engineering of p‐type silicon heterojunction solar cells fabricated using commercial‐grade low‐lifetime silicon wafers
|
journal | December 2019 |
Recent Progress in Understanding the Properties of the Amorphous Silicon/Crystalline Silicon Interface
|
journal | February 2019 |
Pre‐Fabrication Gettering and Hydrogenation Treatments for Silicon Heterojunction Solar Cells: A Possible Path to >700 mV Open‐Circuit Voltages Using Low‐Lifetime Commercial‐Grade p‐Type Czochralski Silicon
|
journal | January 2018 |
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