Nanopatterned articles produced using reconstructed block copolymer films

Russell, Thomas P.; Park, Soojin; Wang;, Jia-Yu; Kim, Bokyung

Title: Nanopatterned articles produced using reconstructed block copolymer films

Patent · Tue May 02 00:00:00 EDT 2017

OSTI ID:1354817

Russell, Thomas P.; Park, Soojin; Wang;, Jia-Yu; Kim, Bokyung

Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.

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Research Organization:: THE UNIVERSITY OF MASSACHUSETTS, Boston, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-96ER45612

Assignee:: THE UNIVERSITY OF MASSACHUSETTS

Patent Number(s):: 9,636,887

Application Number:: 15/138,343

OSTI ID:: 1354817

Resource Relation:: Patent File Date: 2016 Apr 26

Country of Publication:: United States

Language:: English

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