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Title: Model mismatch analysis and compensation for modal phase measuring deflectometry

Abstract

The correspondence residuals due to the discrepancy between the reality and the shape model in use are analyzed for the modal phase measuring deflectometry. Slope residuals are calculated from these discrepancies between the modal estimation and practical acquisition. Since the shape mismatch mainly occurs locally, zonal integration methods which are good at dealing with local variations are used to reconstruct the height residual for compensation. Finally, results of both simulation and experiment indicate the proposed height compensation method is effective, which can be used as a post-complement for the modal phase measuring deflectometry.

Authors:
 [1];  [2];  [3];  [4];  [4];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Sichuan Univ., Chengdu (China). School of Aeronautics and Astronautics
  3. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Chinese Academy of Sciences (CAS), Shanghai (China). Shanghai Inst. of Applied Physics; Univ. of Chinese Academy of Sciences, Beijing (China)
  4. Arizona Optical Systems, Tucson, AZ (United States)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Contributing Org.:
Sichuan Univ., Chengdu (China); Arizona Optical Systems, Tucson, AZ (United States); Univ. of Chinese Academy of Sciences, Beijing (China); Chinese Academy of Sciences (CAS), Shanghai (China)
OSTI Identifier:
1354707
Report Number(s):
BNL-113807-2017-JA
Journal ID: ISSN 1094-4087
Grant/Contract Number:  
AC02-98CH10886
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 25; Journal Issue: 2; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; Camera calibration; Distortion; Fringes; Phase noise; Polarization mode dispersion; Ray tracing; Instrumentation, measurement, and metrology; Phase measurement; Metrology

Citation Formats

Huang, Lei, Xue, Junpeng, Gao, Bo, McPherson, Chris, Beverage, Jacob, and Idir, Mourad. Model mismatch analysis and compensation for modal phase measuring deflectometry. United States: N. p., 2017. Web. doi:10.1364/OE.25.000881.
Huang, Lei, Xue, Junpeng, Gao, Bo, McPherson, Chris, Beverage, Jacob, & Idir, Mourad. Model mismatch analysis and compensation for modal phase measuring deflectometry. United States. doi:10.1364/OE.25.000881.
Huang, Lei, Xue, Junpeng, Gao, Bo, McPherson, Chris, Beverage, Jacob, and Idir, Mourad. Wed . "Model mismatch analysis and compensation for modal phase measuring deflectometry". United States. doi:10.1364/OE.25.000881. https://www.osti.gov/servlets/purl/1354707.
@article{osti_1354707,
title = {Model mismatch analysis and compensation for modal phase measuring deflectometry},
author = {Huang, Lei and Xue, Junpeng and Gao, Bo and McPherson, Chris and Beverage, Jacob and Idir, Mourad},
abstractNote = {The correspondence residuals due to the discrepancy between the reality and the shape model in use are analyzed for the modal phase measuring deflectometry. Slope residuals are calculated from these discrepancies between the modal estimation and practical acquisition. Since the shape mismatch mainly occurs locally, zonal integration methods which are good at dealing with local variations are used to reconstruct the height residual for compensation. Finally, results of both simulation and experiment indicate the proposed height compensation method is effective, which can be used as a post-complement for the modal phase measuring deflectometry.},
doi = {10.1364/OE.25.000881},
journal = {Optics Express},
number = 2,
volume = 25,
place = {United States},
year = {Wed Jan 11 00:00:00 EST 2017},
month = {Wed Jan 11 00:00:00 EST 2017}
}

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