Prediction of recrystallization times in electroplated copper thin films
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- SC00112704
- OSTI ID:
- 1354487
- Report Number(s):
- BNL-113004-2016-JA
- Journal Information:
- Thin Solid Films, Vol. 615; ISSN 0040-6090
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
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