One-dimensional ion-beam figuring for grazing-incidence reflective optics

doi:https://doi.org/10.1107/S1600577515021621

Title: One-dimensional ion-beam figuring for grazing-incidence reflective optics

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Abstract

One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick–Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. In conclusion, the surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics.

Authors:

; Idir, Mourad; Bouet, Nathalie; Kaznatcheev, Konstantine; Huang, Lei; Vescovi, Matthew; Dai, Yifan; Li, Shengyi

Publication Date:: 2016-01-01

Research Org.:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

OSTI Identifier:: 1354461

Report Number(s):: BNL-112978-2016-JA
Journal ID: ISSN 1600-5775

DOE Contract Number:: SC0012704

Resource Type:: Journal Article

Journal Name:: Journal of Synchrotron Radiation (Online)

Additional Journal Information:: Journal Volume: 23; Journal Issue: 1; Journal ID: ISSN 1600-5775

Publisher:: International Union of Crystallography

Country of Publication:: United States

Language:: English

Subject:: ion beam figuring; synchrotron optics; one-dimensional

Citation Formats


                    Zhou, Lin, Idir, Mourad, Bouet, Nathalie, Kaznatcheev, Konstantine, Huang, Lei, Vescovi, Matthew, Dai, Yifan, and Li, Shengyi. One-dimensional ion-beam figuring for grazing-incidence reflective optics.  United States: N. p., 2016. 
        Web.  doi:10.1107/S1600577515021621.

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                    Zhou, Lin, Idir, Mourad, Bouet, Nathalie, Kaznatcheev, Konstantine, Huang, Lei, Vescovi, Matthew, Dai, Yifan, & Li, Shengyi. One-dimensional ion-beam figuring for grazing-incidence reflective optics.  United States.  https://doi.org/10.1107/S1600577515021621

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                    Zhou, Lin, Idir, Mourad, Bouet, Nathalie, Kaznatcheev, Konstantine, Huang, Lei, Vescovi, Matthew, Dai, Yifan, and Li, Shengyi. Fri .  
        "One-dimensional ion-beam figuring for grazing-incidence reflective optics".  United States.  https://doi.org/10.1107/S1600577515021621.

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@article{osti_1354461,

  title        = {One-dimensional ion-beam figuring for grazing-incidence reflective optics},

  author       = {Zhou, Lin and Idir, Mourad and Bouet, Nathalie and Kaznatcheev, Konstantine and Huang, Lei and Vescovi, Matthew and Dai, Yifan and Li, Shengyi},

  abstractNote = {One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick–Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. In conclusion, the surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics.},

  doi          = {10.1107/S1600577515021621},

  url          = {https://www.osti.gov/biblio/1354461},
  journal      = {Journal of Synchrotron Radiation (Online)},

  issn         = {1600-5775},

  number       = 1,

  volume       = 23,

  place        = {United States},

  year         = {2016},

  month        = {1}

}

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