skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: One-dimensional ion-beam figuring for grazing-incidence reflective optics

Abstract

One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick–Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. In conclusion, the surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics.

Authors:
ORCiD logo; ; ; ; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1354461
Report Number(s):
BNL-112978-2016-JA
Journal ID: ISSN 1600-5775
DOE Contract Number:  
SC0012704
Resource Type:
Journal Article
Journal Name:
Journal of Synchrotron Radiation (Online)
Additional Journal Information:
Journal Volume: 23; Journal Issue: 1; Journal ID: ISSN 1600-5775
Publisher:
International Union of Crystallography
Country of Publication:
United States
Language:
English
Subject:
ion beam figuring; synchrotron optics; one-dimensional

Citation Formats

Zhou, Lin, Idir, Mourad, Bouet, Nathalie, Kaznatcheev, Konstantine, Huang, Lei, Vescovi, Matthew, Dai, Yifan, and Li, Shengyi. One-dimensional ion-beam figuring for grazing-incidence reflective optics. United States: N. p., 2016. Web. doi:10.1107/S1600577515021621.
Zhou, Lin, Idir, Mourad, Bouet, Nathalie, Kaznatcheev, Konstantine, Huang, Lei, Vescovi, Matthew, Dai, Yifan, & Li, Shengyi. One-dimensional ion-beam figuring for grazing-incidence reflective optics. United States. https://doi.org/10.1107/S1600577515021621
Zhou, Lin, Idir, Mourad, Bouet, Nathalie, Kaznatcheev, Konstantine, Huang, Lei, Vescovi, Matthew, Dai, Yifan, and Li, Shengyi. Fri . "One-dimensional ion-beam figuring for grazing-incidence reflective optics". United States. https://doi.org/10.1107/S1600577515021621.
@article{osti_1354461,
title = {One-dimensional ion-beam figuring for grazing-incidence reflective optics},
author = {Zhou, Lin and Idir, Mourad and Bouet, Nathalie and Kaznatcheev, Konstantine and Huang, Lei and Vescovi, Matthew and Dai, Yifan and Li, Shengyi},
abstractNote = {One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick–Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. In conclusion, the surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics.},
doi = {10.1107/S1600577515021621},
url = {https://www.osti.gov/biblio/1354461}, journal = {Journal of Synchrotron Radiation (Online)},
issn = {1600-5775},
number = 1,
volume = 23,
place = {United States},
year = {2016},
month = {1}
}