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Title: Higher-K Formation in Atomic Layer Deposited Hf1-XAlxOy

Authors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1354389
Report Number(s):
BNL-112905-2016-JA
Journal ID: ISSN 1938-6737
DOE Contract Number:
SC00112704
Resource Type:
Journal Article
Resource Relation:
Journal Name: ECS Transactions (Online); Journal Volume: 64; Journal Issue: 9
Country of Publication:
United States
Language:
English

Citation Formats

Tapily, K., Consiglio, S., Clark, R., Vasic, R., Wajda, C., Jordan-Sweet, J., Leusink, G., and Diebold, A. C. Higher-K Formation in Atomic Layer Deposited Hf1-XAlxOy. United States: N. p., 2014. Web. doi:10.1149/06409.0123ecst.
Tapily, K., Consiglio, S., Clark, R., Vasic, R., Wajda, C., Jordan-Sweet, J., Leusink, G., & Diebold, A. C. Higher-K Formation in Atomic Layer Deposited Hf1-XAlxOy. United States. doi:10.1149/06409.0123ecst.
Tapily, K., Consiglio, S., Clark, R., Vasic, R., Wajda, C., Jordan-Sweet, J., Leusink, G., and Diebold, A. C. Wed . "Higher-K Formation in Atomic Layer Deposited Hf1-XAlxOy". United States. doi:10.1149/06409.0123ecst.
@article{osti_1354389,
title = {Higher-K Formation in Atomic Layer Deposited Hf1-XAlxOy},
author = {Tapily, K. and Consiglio, S. and Clark, R. and Vasic, R. and Wajda, C. and Jordan-Sweet, J. and Leusink, G. and Diebold, A. C.},
abstractNote = {},
doi = {10.1149/06409.0123ecst},
journal = {ECS Transactions (Online)},
number = 9,
volume = 64,
place = {United States},
year = {Wed Aug 13 00:00:00 EDT 2014},
month = {Wed Aug 13 00:00:00 EDT 2014}
}