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Title: A one-dimensional ion beam figuring system for x-ray mirror fabrication

Abstract

We report on the development of a one-dimensional Ion Beam Figuring (IBF) system for x-ray mirror polishing. Ion beam figuring provides a highly deterministic method for the final precision figuring of optical components with advantages over conventional methods. The system is based on a state of the art sputtering deposition system outfitted with a gridded radio frequency inductive coupled plasma ion beam source equipped with ion optics and dedicated slit developed specifically for this application. The production of an IBF system able to produce an elongated removal function rather than circular is presented in this paper, where we describe in detail the technical aspect and present the first obtained results.

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1354249
Report Number(s):
BNL-112765-2016-JA¿¿¿
Journal ID: ISSN 0034-6748
DOE Contract Number:  
SC00112704
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 10; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Citation Formats

Idir, Mourad, Huang, Lei, Bouet, Nathalie, Kaznatcheev, Konstantine, Vescovi, Matthew, Lauer, Ken, Conley, Ray, Rennie, Kent, Kahn, Jim, Nethery, Richard, and Zhou, Lin. A one-dimensional ion beam figuring system for x-ray mirror fabrication. United States: N. p., 2015. Web. doi:10.1063/1.4934806.
Idir, Mourad, Huang, Lei, Bouet, Nathalie, Kaznatcheev, Konstantine, Vescovi, Matthew, Lauer, Ken, Conley, Ray, Rennie, Kent, Kahn, Jim, Nethery, Richard, & Zhou, Lin. A one-dimensional ion beam figuring system for x-ray mirror fabrication. United States. doi:10.1063/1.4934806.
Idir, Mourad, Huang, Lei, Bouet, Nathalie, Kaznatcheev, Konstantine, Vescovi, Matthew, Lauer, Ken, Conley, Ray, Rennie, Kent, Kahn, Jim, Nethery, Richard, and Zhou, Lin. Thu . "A one-dimensional ion beam figuring system for x-ray mirror fabrication". United States. doi:10.1063/1.4934806.
@article{osti_1354249,
title = {A one-dimensional ion beam figuring system for x-ray mirror fabrication},
author = {Idir, Mourad and Huang, Lei and Bouet, Nathalie and Kaznatcheev, Konstantine and Vescovi, Matthew and Lauer, Ken and Conley, Ray and Rennie, Kent and Kahn, Jim and Nethery, Richard and Zhou, Lin},
abstractNote = {We report on the development of a one-dimensional Ion Beam Figuring (IBF) system for x-ray mirror polishing. Ion beam figuring provides a highly deterministic method for the final precision figuring of optical components with advantages over conventional methods. The system is based on a state of the art sputtering deposition system outfitted with a gridded radio frequency inductive coupled plasma ion beam source equipped with ion optics and dedicated slit developed specifically for this application. The production of an IBF system able to produce an elongated removal function rather than circular is presented in this paper, where we describe in detail the technical aspect and present the first obtained results.},
doi = {10.1063/1.4934806},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 10,
volume = 86,
place = {United States},
year = {2015},
month = {10}
}