An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Ju, Guangxu; Highland, Matthew J.; Yanguas-Gil, Angel; Thompson, Carol; Eastman, Jeffrey A.; Zhou, Hua; Brennan, Sean M.; Stephenson, G. Brian; Fuoss, Paul H.

doi:10.1063/1.4978656

Title: An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Journal Article · Tue Mar 21 00:00:00 EDT 2017 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4978656· OSTI ID:1353038

Ju, Guangxu ^[1]; Highland, Matthew J. ^[1];

^[1]; Thompson, Carol ^[2]; Eastman, Jeffrey A. ^[1]; Zhou, Hua ^[1];

^[3]; Stephenson, G. Brian ^[1]; Fuoss, Paul H. ^[1]

Argonne National Lab. (ANL), Argonne, IL (United States)
Northern Illinois Univ., DeKalb, IL (United States)
Fairview Assoc., Jackson, WY (United States)

Here, we describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); Materials Sciences and Engineering Division

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1353038

Alternate ID(s):: OSTI ID: 1373969

Journal Information:: Review of Scientific Instruments, Vol. 88, Issue 3; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 10 works

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Cited By (3)

Coherent X-ray spectroscopy reveals the persistence of island arrangements during layer-by-layer growth Ju, Guangxu; Xu, Dongwei; Highland, Matthew J. Nature Physics, Vol. 15, Issue 6 https://doi.org/10.1038/s41567-019-0448-1	journal	March 2019
FORTE – a multipurpose high-vacuum diffractometer for tender X-ray diffraction and spectroscopy at the SIRIUS beamline of Synchrotron SOLEIL Ciatto, G.; Aubert, N.; Lecroard, M. Journal of Synchrotron Radiation, Vol. 26, Issue 4 https://doi.org/10.1107/s1600577519003722	journal	May 2019
Dynamics of Atomic Steps on GaN (0001) during Vapor Phase Epitaxy Ju, Guangxu; Xu, Dongwei; Thompson, Carol arXiv https://doi.org/10.48550/arxiv.2007.05083	preprint	January 2020

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