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Title: Three Dimensional Assembly in Directed Self-assembly of Block Copolymers

Abstract

The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Lastly, future work will include control over 3D assembly in sub-10 nm processes.

Authors:
 [1];  [2];  [2];  [3];  [4];  [4];  [1]
  1. Univ. of Chicago, IL (United States). Inst. for Molecular Engineering; Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
  2. Univ. of Chicago, IL (United States). Inst. for Molecular Engineering
  3. Tokyo Ohka Kogyo Co., Ltd., Kanagawa (Japan)
  4. Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1352873
Grant/Contract Number:
AC02-06CH11357
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Journal of Photopolymer Science and Technology
Additional Journal Information:
Journal Volume: 29; Journal Issue: 5; Journal ID: ISSN 0914-9244
Publisher:
The Society of Photopolymer Science and Technology (SPST)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; Directed self-assembly; block copolymer, lithography; contact hole; transmission electron microscopy; metrology

Citation Formats

Segal-Peretz, Tamar, Zhou, Chun, Ren, Jiaxing, Dazai, Takahiro, Ocola, Leonidas E., Divan, Ralu N. S., and Nealey, Paul F. Three Dimensional Assembly in Directed Self-assembly of Block Copolymers. United States: N. p., 2016. Web. doi:10.2494/photopolymer.29.653.
Segal-Peretz, Tamar, Zhou, Chun, Ren, Jiaxing, Dazai, Takahiro, Ocola, Leonidas E., Divan, Ralu N. S., & Nealey, Paul F. Three Dimensional Assembly in Directed Self-assembly of Block Copolymers. United States. doi:10.2494/photopolymer.29.653.
Segal-Peretz, Tamar, Zhou, Chun, Ren, Jiaxing, Dazai, Takahiro, Ocola, Leonidas E., Divan, Ralu N. S., and Nealey, Paul F. Fri . "Three Dimensional Assembly in Directed Self-assembly of Block Copolymers". United States. doi:10.2494/photopolymer.29.653. https://www.osti.gov/servlets/purl/1352873.
@article{osti_1352873,
title = {Three Dimensional Assembly in Directed Self-assembly of Block Copolymers},
author = {Segal-Peretz, Tamar and Zhou, Chun and Ren, Jiaxing and Dazai, Takahiro and Ocola, Leonidas E. and Divan, Ralu N. S. and Nealey, Paul F.},
abstractNote = {The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Lastly, future work will include control over 3D assembly in sub-10 nm processes.},
doi = {10.2494/photopolymer.29.653},
journal = {Journal of Photopolymer Science and Technology},
number = 5,
volume = 29,
place = {United States},
year = {Fri Sep 02 00:00:00 EDT 2016},
month = {Fri Sep 02 00:00:00 EDT 2016}
}

Journal Article:
Free Publicly Available Full Text
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Cited by: 2works
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