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Title: High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

Abstract

Coherent X-ray microscopy by phase retrieval of Bragg diffraction intensities enables lattice distortions within a crystal to be imaged at nanometre-scale spatial resolutions in three dimensions. While this capability can be used to resolve structure–property relationships at the nanoscale under working conditions, strict data measurement requirements can limit the application of current approaches. Here, in this work, we introduce an efficient method of imaging three-dimensional (3D) nanoscale lattice behaviour and strain fields in crystalline materials with a methodology that we call 3D Bragg projection ptychography (3DBPP). This method enables 3D image reconstruction of a crystal volume from a series of two-dimensional X-ray Bragg coherent intensity diffraction patterns measured at a single incident beam angle. Structural information about the sample is encoded along two reciprocal-space directions normal to the Bragg diffracted exit beam, and along the third dimension in real space by the scanning beam. Finally, we present our approach with an analytical derivation, a numerical demonstration, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.

Authors:
 [1];  [2];  [3];  [4];  [5];  [1];  [2]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
  2. Institut Fresnel, Marseille (France). Aix-Marseille University, CNRS, Centrale Marseille
  3. Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
  4. IBM T.J. Watson Research Center, Yorktown Heights, NY (United States)
  5. BM Semiconductor Research and Development Center, Hopewell Junction, NY (United States)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1352574
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Nature Materials
Additional Journal Information:
Journal Volume: 16; Journal Issue: 2; Journal ID: ISSN 1476-1122
Publisher:
Nature Publishing Group
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Hruszkewycz, S. O., Allain, M., Holt, M. V., Murray, C. E., Holt, J. R., Fuoss, P. H., and Chamard, V. High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography. United States: N. p., 2016. Web. doi:10.1038/NMAT4798.
Hruszkewycz, S. O., Allain, M., Holt, M. V., Murray, C. E., Holt, J. R., Fuoss, P. H., & Chamard, V. High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography. United States. https://doi.org/10.1038/NMAT4798
Hruszkewycz, S. O., Allain, M., Holt, M. V., Murray, C. E., Holt, J. R., Fuoss, P. H., and Chamard, V. Mon . "High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography". United States. https://doi.org/10.1038/NMAT4798. https://www.osti.gov/servlets/purl/1352574.
@article{osti_1352574,
title = {High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography},
author = {Hruszkewycz, S. O. and Allain, M. and Holt, M. V. and Murray, C. E. and Holt, J. R. and Fuoss, P. H. and Chamard, V.},
abstractNote = {Coherent X-ray microscopy by phase retrieval of Bragg diffraction intensities enables lattice distortions within a crystal to be imaged at nanometre-scale spatial resolutions in three dimensions. While this capability can be used to resolve structure–property relationships at the nanoscale under working conditions, strict data measurement requirements can limit the application of current approaches. Here, in this work, we introduce an efficient method of imaging three-dimensional (3D) nanoscale lattice behaviour and strain fields in crystalline materials with a methodology that we call 3D Bragg projection ptychography (3DBPP). This method enables 3D image reconstruction of a crystal volume from a series of two-dimensional X-ray Bragg coherent intensity diffraction patterns measured at a single incident beam angle. Structural information about the sample is encoded along two reciprocal-space directions normal to the Bragg diffracted exit beam, and along the third dimension in real space by the scanning beam. Finally, we present our approach with an analytical derivation, a numerical demonstration, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.},
doi = {10.1038/NMAT4798},
url = {https://www.osti.gov/biblio/1352574}, journal = {Nature Materials},
issn = {1476-1122},
number = 2,
volume = 16,
place = {United States},
year = {2016},
month = {11}
}

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Cited by: 17 works
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Works referenced in this record:

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  • Hruszkewycz, S. O.; Holt, M. V.; Maser, J.
  • Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 372, Issue 2010
  • https://doi.org/10.1098/rsta.2013.0118

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    Works referencing / citing this record:

    X-ray ptychography
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    Bragg projection ptychography on niobium phase domains
    journal, July 2017


    Multimodal X-ray imaging of grain-level properties and performance in a polycrystalline solar cell
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    X-ray ptychography
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    Bragg projection ptychography on niobium phase domains
    journal, July 2017


    Multimodal X-ray imaging of grain-level properties and performance in a polycrystalline solar cell
    journal, May 2019


    Multimodal x-ray nanotomography
    journal, April 2020


    Multimodal X-ray imaging of grain-level properties and performance in a polycrystalline solar cell
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    Correlating dynamic strain and photoluminescence of solid-state defects with stroboscopic x-ray diffraction microscopy
    journal, July 2019


    Spin–phonon interactions in silicon carbide addressed by Gaussian acoustics
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    Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies
    journal, March 2018


    X-ray ptychography on low-dimensional hard-condensed matter materials
    journal, March 2019


    Phase modulation due to crystal diffraction by ptychographic imaging
    journal, March 2018


    Numerical study of Bragg CDI on thick polycrystalline specimens
    journal, January 2018


    Using automatic differentiation as a general framework for ptychographic reconstruction
    journal, January 2019


    Ptychography with multiple wavelength illumination
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    Further improvements to the ptychographical iterative engine
    journal, January 2017