High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

Hruszkewycz, S. O.; Allain, M.; Holt, M. V.; Murray, C. E.; Holt, J. R.; Fuoss, P. H.; Chamard, V.

doi:10.1038/NMAT4798

Title: High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

Journal Article · Mon Nov 21 00:00:00 EST 2016 · Nature Materials

DOI:https://doi.org/10.1038/NMAT4798· OSTI ID:1352574

Hruszkewycz, S. O. ^[1]; Allain, M. ^[2]; Holt, M. V. ^[3]; Murray, C. E. ^[4]; Holt, J. R. ^[5]; Fuoss, P. H. ^[1]; Chamard, V. ^[2]

Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
Institut Fresnel, Marseille (France). Aix-Marseille University, CNRS, Centrale Marseille
Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
IBM T.J. Watson Research Center, Yorktown Heights, NY (United States)
BM Semiconductor Research and Development Center, Hopewell Junction, NY (United States)

Coherent X-ray microscopy by phase retrieval of Bragg diffraction intensities enables lattice distortions within a crystal to be imaged at nanometre-scale spatial resolutions in three dimensions. While this capability can be used to resolve structure–property relationships at the nanoscale under working conditions, strict data measurement requirements can limit the application of current approaches. Here, in this work, we introduce an efficient method of imaging three-dimensional (3D) nanoscale lattice behaviour and strain fields in crystalline materials with a methodology that we call 3D Bragg projection ptychography (3DBPP). This method enables 3D image reconstruction of a crystal volume from a series of two-dimensional X-ray Bragg coherent intensity diffraction patterns measured at a single incident beam angle. Structural information about the sample is encoded along two reciprocal-space directions normal to the Bragg diffracted exit beam, and along the third dimension in real space by the scanning beam. Finally, we present our approach with an analytical derivation, a numerical demonstration, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1352574

Journal Information:: Nature Materials, Vol. 16, Issue 2; ISSN 1476-1122

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 70 works

Citation information provided by
Web of Science

References (47)

Phase retrieval with transverse translation diversity: a nonlinear optimization approach Guizar-Sicairos, Manuel; Fienup, James R. Optics Express, Vol. 16, Issue 10 https://doi.org/10.1364/OE.16.007264	journal	January 2008
Observation of semiconductor device channel strain using in-line high resolution X-ray diffraction Holt, Judson R.; Madan, Anita; Harley, Eric C. T. Journal of Applied Physics, Vol. 114, Issue 15 https://doi.org/10.1063/1.4824819	journal	October 2013
Partial coherence effects on the imaging of small crystals using coherent x-ray diffraction Vartanyants, I. A.; Robinson, I. K. Journal of Physics: Condensed Matter, Vol. 13, Issue 47 https://doi.org/10.1088/0953-8984/13/47/305	journal	November 2001
Three-dimensional coordinates of individual atoms in materials revealed by electron tomography Xu, Rui; Chen, Chien-Chun; Wu, Li Nature Materials, Vol. 14, Issue 11 https://doi.org/10.1038/nmat4426	journal	September 2015
A phase retrieval algorithm for shifting illumination Rodenburg, J. M.; Faulkner, H. M. L. Applied Physics Letters, Vol. 85, Issue 20 https://doi.org/10.1063/1.1823034	journal	November 2004
Bragg x-ray ptychography of a silicon crystal: Visualization of the dislocation strain field and the production of a vortex beam Takahashi, Yukio; Suzuki, Akihiro; Furutaku, Shin Physical Review B, Vol. 87, Issue 12 https://doi.org/10.1103/PhysRevB.87.121201	journal	March 2013
Reconstructing state mixtures from diffraction measurements Thibault, Pierre; Menzel, Andreas Nature, Vol. 494, Issue 7435 https://doi.org/10.1038/nature11806	journal	February 2013
Ptychographic transmission microscopy in three dimensions using a multi-slice approach Maiden, A. M.; Humphry, M. J.; Rodenburg, J. M. Journal of the Optical Society of America A, Vol. 29, Issue 8 https://doi.org/10.1364/JOSAA.29.001606	journal	January 2012
An improved ptychographical phase retrieval algorithm for diffractive imaging Maiden, Andrew M.; Rodenburg, John M. Ultramicroscopy, Vol. 109, Issue 10 https://doi.org/10.1016/j.ultramic.2009.05.012	journal	September 2009
Maximum-likelihood refinement for coherent diffractive imaging Thibault, P.; Guizar-Sicairos, M. New Journal of Physics, Vol. 14, Issue 6 https://doi.org/10.1088/1367-2630/14/6/063004	journal	June 2012
X-ray lensless microscopy from undersampled diffraction intensities Berenguer, F.; Godard, P.; Allain, M. Physical Review B, Vol. 88, Issue 14 https://doi.org/10.1103/PhysRevB.88.144101	journal	October 2013
Fourier shell correlation threshold criteria van Heel, Marin; Schatz, Michael Journal of Structural Biology, Vol. 151, Issue 3 https://doi.org/10.1016/j.jsb.2005.05.009	journal	September 2005
Phase retrieval from the magnitude of the Fourier transforms of nonperiodic objects Miao, J.; Sayre, D.; Chapman, H. N. Journal of the Optical Society of America A, Vol. 15, Issue 6 https://doi.org/10.1364/JOSAA.15.001662	journal	January 1998
Topological defect dynamics in operando battery nanoparticles Ulvestad, A.; Singer, A.; Clark, J. N. Science, Vol. 348, Issue 6241 https://doi.org/10.1126/science.aaa1313	journal	June 2015
Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens Miao, Jianwei; Charalambous, Pambos; Kirz, Janos Nature, Vol. 400, Issue 6742 https://doi.org/10.1038/22498	journal	July 1999
Strain in a silicon-on-insulator nanostructure revealed by 3D x-ray Bragg ptychography Chamard, V.; Allain, M.; Godard, P. Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep09827	journal	May 2015
Imaging Local Polarization in Ferroelectric Thin Films by Coherent X-Ray Bragg Projection Ptychography Hruszkewycz, S. O.; Highland, M. J.; Holt, M. V. Physical Review Letters, Vol. 110, Issue 17, Article No. 177601 https://doi.org/10.1103/PhysRevLett.110.177601	journal	April 2013
Imaging of highly inhomogeneous strain field in nanocrystals using x-ray Bragg ptychography: A numerical study Godard, P.; Allain, M.; Chamard, V. Physical Review B, Vol. 84, Issue 14 https://doi.org/10.1103/PhysRevB.84.144109	journal	October 2011
‘Big Bang’ tomography as a new route to atomic-resolution electron tomography Van Dyck, Dirk; Jinschek, Joerg R.; Chen, Fu-Rong Nature, Vol. 486, Issue 7402 https://doi.org/10.1038/nature11074	journal	June 2012
Efficient modeling of Bragg coherent x-ray nanobeam diffraction Hruszkewycz, S. O.; Holt, M. V.; Allain, M. Optics Letters, Vol. 40, Issue 14 https://doi.org/10.1364/OL.40.003241	journal	January 2015
Coherent Bragg nanodiffraction at the hard X-ray Nanoprobe beamline Hruszkewycz, S. O.; Holt, M. V.; Maser, J. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 372, Issue 2010 https://doi.org/10.1098/rsta.2013.0118	journal	March 2014
Beyond crystallography: Diffractive imaging using coherent x-ray light sources Miao, J.; Ishikawa, T.; Robinson, I. K. Science, Vol. 348, Issue 6234 https://doi.org/10.1126/science.aaa1394	journal	April 2015
Quantitative Nanoscale Imaging of Lattice Distortions in Epitaxial Semiconductor Heterostructures Using Nanofocused X-ray Bragg Projection Ptychography Hruszkewycz, S. O.; Holt, M. V.; Murray, C. E. Nano Letters, Vol. 12, Issue 10 https://doi.org/10.1021/nl303201w	journal	September 2012
Coherent diffraction imaging of nanoscale strain evolution in a single crystal under high pressure Yang, Wenge; Huang, Xiaojing; Harder, Ross Nature Communications, Vol. 4, Issue 1 https://doi.org/10.1038/ncomms2661	journal	April 2013
Beugung im inhomogenen Primärstrahlwellenfeld. I. Prinzip einer Phasenmessung von Elektronenbeungungsinterferenzen Hoppe, W. Acta Crystallographica Section A, Vol. 25, Issue 4 https://doi.org/10.1107/S0567739469001045	journal	July 1969
High-Resolution Scanning X-ray Diffraction Microscopy Thibault, P.; Dierolf, M.; Menzel, A. Science, Vol. 321, Issue 5887 https://doi.org/10.1126/science.1158573	journal	July 2008
Ptychographic X-ray computed tomography at the nanoscale Dierolf, Martin; Menzel, Andreas; Thibault, Pierre Nature, Vol. 467, Issue 7314 https://doi.org/10.1038/nature09419	journal	September 2010
Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures Murray, Conal E.; Saenger, K. L.; Kalenci, O. Journal of Applied Physics, Vol. 104, Issue 1 https://doi.org/10.1063/1.2952044	journal	July 2008
A hard X-ray nanoprobe beamline for nanoscale microscopy Winarski, Robert P.; Holt, Martin V.; Rose, Volker Journal of Synchrotron Radiation, Vol. 19, Issue 6 https://doi.org/10.1107/S0909049512036783	journal	September 2012
Noise models for low counting rate coherent diffraction imaging Godard, Pierre; Allain, Marc; Chamard, Virginie Optics Express, Vol. 20, Issue 23 https://doi.org/10.1364/OE.20.025914	journal	January 2012
Three-dimensional mapping of a deformation field inside a nanocrystal Pfeifer, Mark A.; Williams, Garth J.; Vartanyants, Ivan A. Nature, Vol. 442, Issue 7098 https://doi.org/10.1038/nature04867	journal	July 2006
Differential stress induced by thiol adsorption on facetted nanocrystals Watari, Moyu; McKendry, Rachel A.; Vögtli, Manuel Nature Materials, Vol. 10, Issue 11 https://doi.org/10.1038/nmat3124	journal	September 2011
Three-dimensional structure determination from a single view Raines, Kevin S.; Salha, Sara; Sandberg, Richard L. Nature, Vol. 463, Issue 7278 https://doi.org/10.1038/nature08705	journal	December 2009
Ultrafast Three-Dimensional Imaging of Lattice Dynamics in Individual Gold Nanocrystals Clark, J. N.; Beitra, L.; Xiong, G. Science, Vol. 341, Issue 6141 https://doi.org/10.1126/science.1236034	journal	May 2013
Ptychographic Fresnel coherent diffractive imaging Vine, D. J.; Williams, G. J.; Abbey, B. Physical Review A, Vol. 80, Issue 6 https://doi.org/10.1103/PhysRevA.80.063823	journal	December 2009
Phase retrieval by iterated projections Elser, Veit Journal of the Optical Society of America A, Vol. 20, Issue 1 https://doi.org/10.1364/JOSAA.20.000040	journal	January 2003
Local strain in a 3D nano-crystal revealed by 2D coherent X-ray diffraction imaging Labat, S.; Chamard, V.; Thomas, O. Thin Solid Films, Vol. 515, Issue 14 https://doi.org/10.1016/j.tsf.2006.12.031	journal	May 2007
Translation position determination in ptychographic coherent diffraction imaging Zhang, Fucai; Peterson, Isaac; Vila-Comamala, Joan Optics Express, Vol. 21, Issue 11 https://doi.org/10.1364/OE.21.013592	journal	January 2013
Hard-X-Ray Lensless Imaging of Extended Objects Rodenburg, J. M.; Hurst, A. C.; Cullis, A. G. Physical Review Letters, Vol. 98, Issue 3 https://doi.org/10.1103/PhysRevLett.98.034801	journal	January 2007
Three-dimensional high-resolution quantitative microscopy of extended crystals Godard, P.; Carbone, G.; Allain, M. Nature Communications, Vol. 2, Issue 1 https://doi.org/10.1038/ncomms1569	journal	September 2011
Some implications of a theorem due to Shannon Sayre, D. Acta Crystallographica, Vol. 5, Issue 6 https://doi.org/10.1107/S0365110X52002276	journal	November 1952
Three-dimensional imaging of dislocation propagation during crystal growth and dissolution Clark, Jesse N.; Ihli, Johannes; Schenk, Anna S. Nature Materials, Vol. 14, Issue 8 https://doi.org/10.1038/nmat4320	journal	June 2015
Structural sensitivity of x-ray Bragg projection ptychography to domain patterns in epitaxial thin films Hruszkewycz, S. O.; Zhang, Q.; Holt, M. V. Physical Review A, Vol. 94, Issue 4 https://doi.org/10.1103/PhysRevA.94.043803	journal	October 2016
Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging Vila-Comamala, Joan; Diaz, Ana; Guizar-Sicairos, Manuel Optics Express, Vol. 19, Issue 22 https://doi.org/10.1364/OE.19.021333	journal	January 2011
Mathematical Methods in Image Reconstruction Natterer, Frank; Wübbeling, Frank Mathematical Modeling and Computation https://doi.org/10.1137/1.9780898718324	book	January 2001
Three-dimensional structure determination from a single view Raines, Kevin S.; Salha, Sara; Sandberg, Richard L. arXiv https://doi.org/10.48550/arxiv.0905.0269	text	January 2009
Phase retrieval by iterated projections Elser, Veit arXiv https://doi.org/10.48550/arxiv.math/0111080	preprint	January 2001

Cited By (16)

Correlating dynamic strain and photoluminescence of solid-state defects with stroboscopic x-ray diffraction microscopy Whiteley, S. J.; Heremans, F. J.; Wolfowicz, G. Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-11365-9	journal	July 2019
X-ray ptychography Pfeiffer, Franz Nature Photonics, Vol. 12, Issue 1 https://doi.org/10.1038/s41566-017-0072-5	journal	December 2017
Spin–phonon interactions in silicon carbide addressed by Gaussian acoustics Whiteley, Samuel J.; Wolfowicz, Gary; Anderson, Christopher P. Nature Physics, Vol. 15, Issue 5 https://doi.org/10.1038/s41567-019-0420-0	journal	February 2019
Identifying Defects with Guided Algorithms in Bragg Coherent Diffractive Imaging Ulvestad, A.; Nashed, Y.; Beutier, G. Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/s41598-017-09582-7	journal	August 2017
Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies Andersen, Tassie K.; Cook, Seyoung; Benda, Erika Review of Scientific Instruments, Vol. 89, Issue 3 https://doi.org/10.1063/1.5008369	journal	March 2018
X-ray ptychography on low-dimensional hard-condensed matter materials Shi, Xiaowen; Burdet, Nicolas; Chen, Bo Applied Physics Reviews, Vol. 6, Issue 1 https://doi.org/10.1063/1.5045131	journal	March 2019
Bragg projection ptychography on niobium phase domains Burdet, Nicolas; Shi, Xiaowen; Clark, Jesse N. Physical Review B, Vol. 96, Issue 1 https://doi.org/10.1103/physrevb.96.014109	journal	July 2017
Numerical study of Bragg CDI on thick polycrystalline specimens Pedersen, Anders Filsøe; Chamard, Virginie; Poulsen, Henning Friis Optics Express, Vol. 26, Issue 18 https://doi.org/10.1364/oe.26.023411	journal	January 2018
Using automatic differentiation as a general framework for ptychographic reconstruction Kandel, Saugat; Maddali, S.; Allain, Marc Optics Express, Vol. 27, Issue 13 https://doi.org/10.1364/oe.27.018653	journal	January 2019
Multimodal x-ray nanotomography Gürsoy, Doğa; Jacobsen, Chris MRS Bulletin, Vol. 45, Issue 4 https://doi.org/10.1557/mrs.2020.85	journal	April 2020
Multimodal X-ray imaging of grain-level properties and performance in a polycrystalline solar cell Ulvestad, A.; Hruszkewycz, S. O.; Holt, M. V. Deutsches Elektronen-Synchrotron, DESY, Hamburg https://doi.org/10.3204/pubdb-2019-02309	text	January 2019
X-ray ptychography Thibault, P. Acta Crystallographica Section A Foundations of Crystallography, Vol. 67, Issue a1 https://doi.org/10.1107/s0108767311097959	journal	August 2011
Bragg projection ptychography on niobium phase domains Burdet, Nicolas; Shi, Xiaowen; Clark, Jesse N. Deutsches Elektronen-Synchrotron, DESY, Hamburg https://doi.org/10.3204/pubdb-2018-00378	text	January 2017
X-ray microscopy Lider, V. V. Physics-Uspekhi, Vol. 60, Issue 2 https://doi.org/10.3367/ufne.2016.06.037830	journal	February 2017
X-ray microscopy Cosslett, V. E. Reports on Progress in Physics, Vol. 28, Issue 1 https://doi.org/10.1088/0034-4885/28/1/311	journal	July 1965
Phase modulation due to crystal diffraction by ptychographic imaging Civita, M.; Diaz, A.; Bean, R. J. Deutsches Elektronen-Synchrotron, DESY, Hamburg https://doi.org/10.3204/pubdb-2019-00087	text	January 2018

Similar Records

Measuring Three-Dimensional Strain and Structural Defects in a Single InGaAs Nanowire Using Coherent X-ray Multiangle Bragg Projection Ptychography

Journal Article · Mon Jan 08 00:00:00 EST 2018 · Nano Letters · OSTI ID:1352574

Hill, Megan O.; Calvo-Almazan, Irene; Allain, Marc; +13 more

A framework for 3-D coherent diffraction imaging by focused beam x-ray Bragg ptychography.

Journal Article · Wed Jun 15 00:00:00 EDT 2011 · Opt. Lett. · OSTI ID:1352574

Hruszkewycz, S O; Holt, M V; Tripathi, A; +2 more

Concurrent multi-peak Bragg coherent x-ray diffraction imaging of 3D nanocrystal lattice displacement via global optimization

Journal Article · Tue May 23 00:00:00 EDT 2023 · npj Computational Materials · OSTI ID:1352574

Maddali, Siddharth; Frazer, Travis D.; Delegan, Nazar; +12 more

Related Subjects

36 MATERIALS SCIENCE

Title: High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

Citation Formats

References (47)

Cited By (16)

Similar Records

Related Subjects