skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

Abstract

A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.

Inventors:
; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1350955
Patent Number(s):
8,957,567
Application Number:
13/593,799
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Aug 24
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Shu, Deming, Kearney, Steven P., and Preissner, Curt A. Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages. United States: N. p., 2015. Web.
Shu, Deming, Kearney, Steven P., & Preissner, Curt A. Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages. United States.
Shu, Deming, Kearney, Steven P., and Preissner, Curt A. Tue . "Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages". United States. doi:. https://www.osti.gov/servlets/purl/1350955.
@article{osti_1350955,
title = {Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages},
author = {Shu, Deming and Kearney, Steven P. and Preissner, Curt A.},
abstractNote = {A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 17 00:00:00 EST 2015},
month = {Tue Feb 17 00:00:00 EST 2015}
}

Patent:

Save / Share:

Works referenced in this record: