Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

Shu, Deming; Kearney, Steven P.; Preissner, Curt A.

Title: Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages

Patent · Tue Feb 17 00:00:00 EST 2015

OSTI ID:1350955

Shu, Deming; Kearney, Steven P.; Preissner, Curt A.

A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-06CH11357

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Number(s):: 8,957,567

Application Number:: 13/593,799

OSTI ID:: 1350955

Resource Relation:: Patent File Date: 2012 Aug 24

Country of Publication:: United States

Language:: English

References (10)

Low profile, high load vertical rolling positioning stage Shu, Deming; Barraza, Juan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5526903 US Patent Document 5,526,903	patent	June 1996
Optical design for laser encoder resolution extension and angular measurement Shu, Deming https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5896200 US Patent Document 5,896,200	patent	April 1999
Redundantly constrained laminar structure as weak-link mechanisms Shu, Deming; Toellner, Thomas; Alp, E. Ercan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6607840 US Patent Document 6,607,840	patent	August 2003
Redundantly constrained laminar structure as weak-link mechanisms Shu, Deming; Toellner, Thomas; Alp, E. Ercan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6984335 US Patent Document 6,984,335	patent	January 2006
Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses Shu, Deming; Yan, Hanfei; Maser, Jorg M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7597475 US Patent Document 7,597,475	patent	October 2009
Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution Shu, Deming; Maser, Jorg M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7994688 US Patent Document 7,994,688	patent	August 2011
Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution Shu, Deming; Maser, Jorg M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8089199 US Patent Document 8,089,199	patent	January 2012
Vibratory actuator Higashionji, Masaru; Mukae, Hideaki; Nagaoka, Eiichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8314533 US Patent Document 8,314,533	patent	November 2012
Compact Nanofabrication Apparatus Rozhok, Sergey V.; Nelson, Michael; Amro, Nabil A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090023607 US Patent Application 12/116908; 20090023607	patent-application	January 2009
Analytical and experimental characterisation of high-precision flexural pivots subjected to lateral loads Zelenika, S.; De Bona, F. Precision Engineering, Vol. 26, Issue 4 https://doi.org/10.1016/S0141-6359(02)00149-6	journal	October 2002

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