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Title: Method for spatially modulating X-ray pulses using MEMS-based X-ray optics

Abstract

A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.

Inventors:
; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1349886
Patent Number(s):
8,976,933
Application Number:
13/246,008
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
DOE Contract Number:
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Sep 27
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

Citation Formats

Lopez, Daniel, Shenoy, Gopal, Wang, Jin, Walko, Donald A., Jung, Il-Woong, and Mukhopadhyay, Deepkishore. Method for spatially modulating X-ray pulses using MEMS-based X-ray optics. United States: N. p., 2015. Web.
Lopez, Daniel, Shenoy, Gopal, Wang, Jin, Walko, Donald A., Jung, Il-Woong, & Mukhopadhyay, Deepkishore. Method for spatially modulating X-ray pulses using MEMS-based X-ray optics. United States.
Lopez, Daniel, Shenoy, Gopal, Wang, Jin, Walko, Donald A., Jung, Il-Woong, and Mukhopadhyay, Deepkishore. Tue . "Method for spatially modulating X-ray pulses using MEMS-based X-ray optics". United States. doi:. https://www.osti.gov/servlets/purl/1349886.
@article{osti_1349886,
title = {Method for spatially modulating X-ray pulses using MEMS-based X-ray optics},
author = {Lopez, Daniel and Shenoy, Gopal and Wang, Jin and Walko, Donald A. and Jung, Il-Woong and Mukhopadhyay, Deepkishore},
abstractNote = {A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 10 00:00:00 EDT 2015},
month = {Tue Mar 10 00:00:00 EDT 2015}
}

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