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Title: Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale

Abstract

An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.

Inventors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1349672
Patent Number(s):
9,613,729
Application Number:
14/282,281
Assignee:
UChicago Argonne LLC ANL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 May 20
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Shu, Deming, Liu, Jie, Gleber, Sophie C., Vila-Comamala, Joan, Lai, Barry, Maser, Jorg M., Roehrig, Christian, Wojcik, Michael J., and Vogt, Franz Stefan. Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale. United States: N. p., 2017. Web.
Shu, Deming, Liu, Jie, Gleber, Sophie C., Vila-Comamala, Joan, Lai, Barry, Maser, Jorg M., Roehrig, Christian, Wojcik, Michael J., & Vogt, Franz Stefan. Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale. United States.
Shu, Deming, Liu, Jie, Gleber, Sophie C., Vila-Comamala, Joan, Lai, Barry, Maser, Jorg M., Roehrig, Christian, Wojcik, Michael J., and Vogt, Franz Stefan. Tue . "Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale". United States. doi:. https://www.osti.gov/servlets/purl/1349672.
@article{osti_1349672,
title = {Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale},
author = {Shu, Deming and Liu, Jie and Gleber, Sophie C. and Vila-Comamala, Joan and Lai, Barry and Maser, Jorg M. and Roehrig, Christian and Wojcik, Michael J. and Vogt, Franz Stefan},
abstractNote = {An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 04 00:00:00 EDT 2017},
month = {Tue Apr 04 00:00:00 EDT 2017}
}

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