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Title: Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale

Abstract

An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.

Inventors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1349672
Patent Number(s):
9,613,729
Application Number:
14/282,281
Assignee:
UChicago Argonne LLC ANL
DOE Contract Number:
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 May 20
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Shu, Deming, Liu, Jie, Gleber, Sophie C., Vila-Comamala, Joan, Lai, Barry, Maser, Jorg M., Roehrig, Christian, Wojcik, Michael J., and Vogt, Franz Stefan. Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale. United States: N. p., 2017. Web.
Shu, Deming, Liu, Jie, Gleber, Sophie C., Vila-Comamala, Joan, Lai, Barry, Maser, Jorg M., Roehrig, Christian, Wojcik, Michael J., & Vogt, Franz Stefan. Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale. United States.
Shu, Deming, Liu, Jie, Gleber, Sophie C., Vila-Comamala, Joan, Lai, Barry, Maser, Jorg M., Roehrig, Christian, Wojcik, Michael J., and Vogt, Franz Stefan. Tue . "Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale". United States. doi:. https://www.osti.gov/servlets/purl/1349672.
@article{osti_1349672,
title = {Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale},
author = {Shu, Deming and Liu, Jie and Gleber, Sophie C. and Vila-Comamala, Joan and Lai, Barry and Maser, Jorg M. and Roehrig, Christian and Wojcik, Michael J. and Vogt, Franz Stefan},
abstractNote = {An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 04 00:00:00 EDT 2017},
month = {Tue Apr 04 00:00:00 EDT 2017}
}

Patent:

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  • The question is addressed of what is the smallest spot size that hard x rays can be focused to using Fresnel zone plates. A thick tilted zone plate optic with large numerical aperture is considered in numerical simulations and is shown to efficiently focus hard x rays down to below 1 nm, well below the theoretical limit for reflective optics such as waveguides and that of refractive optics. The focal spot size is ultimately limited by the atomic structure of matter. The practical realization of these optics will require a significant technological effort, but would enable hard x-ray nanoprobe studiesmore » with close to atomic resolution at current and future x-ray sources, such as x-ray free electron lasers and energy recovery linacs.« less
  • A mathematical model describing the focusing efficiency of transmission phase modulating Fresnel zone plates in the hard x-ray regime (>1keV) has been developed. The mathematical model is based on the x-ray optical properties (complex index of refraction) of the constituent materials, the incident energy, the thickness of the optic and a variable [alpha] which defines the material concentration profile within one zone plate period. The focusing properties (focusing efficiency and resolution) of two zone plates (Al-Cu and Ni) designed to optimally focus 8 keV photons have been experimentally measured at beamline X18b of the National Synchrotron Light Source located atmore » Brookhaven National Lab. The experimental apparatus and procedures used to measure the focusing properties of the two zone plates and the techniques used in their fabrication have also been presented. The measured focusing efficiency has been compared to the theoretical predictions and has been found to be in agreement. The measured resolution of the Al-Cu zone plate has also been found to be in agreement with the expected geometric demagnification of the available x-ray source.« less
  • We are developing a new hard x-ray nanoprobe instrument that is one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials being constructed at Argonne National Laboratory. This new probe will cover an energy range of 3-30 keV with 30-nm spatial resolution. The system is designed to accommodate x-ray optics with a resolution limit of 10 nm, therefore, it requires staging of x-ray optics and specimens with a mechanical repeatability of better than 5 nm. Fast feedback for differential vibration control between the zone-plate x-ray optics and the sample holder has been implemented in the designmore » using a digital-signal-processor-based real-time closed-loop feedback technique. A specially designed, custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurements with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The optomechanical design of the instrument positioning stage system with nanometer-scale active vibration control is presented in this paper.« less
  • We are developing a new hard x-ray nanoprobe instrument that is one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials being constructed at Argonne National Laboratory. This new probe will cover an energy range of 3-30 keV with 30-nm spacial resolution. The system is designed to accommodate x-ray optics with a resolution limit of 10 nm, therefore, it requires staging of x-ray optics and specimens with a mechanical repeatability of better than 5 nm. Fast feedback for differential vibration control between the zone-plate x-ray optics and the sample holder has been implemented in the designmore » using a digital-signal-processor-based real-time closed-loop feedback technique. A specially designed, custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurements with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The optomechanical design of the instrument positioning stage system with nanometer-scale active vibration control is presented in this paper.« less