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Title: Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

Abstract

A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.

Inventors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Teledyne Scientific & Imaging, LLC. Thousand Oaks, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1348369
Patent Number(s):
9,607,748
Application Number:
14/476,644
Assignee:
Teledyne Scientific & Imaging, LLC HQPR
DOE Contract Number:
AR0000113
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Sep 03
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Mihailovich, Robert E., Papavasiliou, Alex P., Mehrotra, Vivek, Stupar, Philip A., Borwick, III, Robert L., Ganguli, Rahul, and DeNatale, Jeffrey F.. Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof. United States: N. p., 2017. Web.
Mihailovich, Robert E., Papavasiliou, Alex P., Mehrotra, Vivek, Stupar, Philip A., Borwick, III, Robert L., Ganguli, Rahul, & DeNatale, Jeffrey F.. Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof. United States.
Mihailovich, Robert E., Papavasiliou, Alex P., Mehrotra, Vivek, Stupar, Philip A., Borwick, III, Robert L., Ganguli, Rahul, and DeNatale, Jeffrey F.. Tue . "Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof". United States. doi:. https://www.osti.gov/servlets/purl/1348369.
@article{osti_1348369,
title = {Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof},
author = {Mihailovich, Robert E. and Papavasiliou, Alex P. and Mehrotra, Vivek and Stupar, Philip A. and Borwick, III, Robert L. and Ganguli, Rahul and DeNatale, Jeffrey F.},
abstractNote = {A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 28 00:00:00 EDT 2017},
month = {Tue Mar 28 00:00:00 EDT 2017}
}

Patent:

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