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Title: Sandia Advanced MEMS Design Tools v. 3.0

Abstract

This is a major revision to the Sandia Advanced MEMS Design Tools. It replaces all previous versions. New features in this version: Revised to support AutoCAD 2014 and 2015 This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While there exists some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.

Authors:
 [1];  [1];  [1];  [2];  [2];  [1]
  1. Sandia National Laboratories
  2. L&M Technologies
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1343553
Report Number(s):
Sandia Advanced MEMS Design Tools; 005148MLTPL00
SCR #392.6
DOE Contract Number:
AC04-94AL85000
Resource Type:
Software
Software Revision:
00
Software Package Number:
005148
Software CPU:
MLTPL
Source Code Available:
No
Country of Publication:
United States

Citation Formats

Yarberry, Victor R., Allen, James J., Lantz, Jeffrey W., Priddy, Brian, Westlin, Belinda, and Young, Andrew. Sandia Advanced MEMS Design Tools v. 3.0. Computer software. Vers. 00. USDOE. 25 Aug. 2016. Web.
Yarberry, Victor R., Allen, James J., Lantz, Jeffrey W., Priddy, Brian, Westlin, Belinda, & Young, Andrew. (2016, August 25). Sandia Advanced MEMS Design Tools v. 3.0 (Version 00) [Computer software].
Yarberry, Victor R., Allen, James J., Lantz, Jeffrey W., Priddy, Brian, Westlin, Belinda, and Young, Andrew. Sandia Advanced MEMS Design Tools v. 3.0. Computer software. Version 00. August 25, 2016.
@misc{osti_1343553,
title = {Sandia Advanced MEMS Design Tools v. 3.0, Version 00},
author = {Yarberry, Victor R. and Allen, James J. and Lantz, Jeffrey W. and Priddy, Brian and Westlin, Belinda and Young, Andrew},
abstractNote = {This is a major revision to the Sandia Advanced MEMS Design Tools. It replaces all previous versions. New features in this version: Revised to support AutoCAD 2014 and 2015 This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While there exists some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.},
doi = {},
year = {Thu Aug 25 00:00:00 EDT 2016},
month = {Thu Aug 25 00:00:00 EDT 2016},
note =
}

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