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Title: Sandia Advanced MEMS Design Tools v. 3.0

Abstract

This is a major revision to the Sandia Advanced MEMS Design Tools. It replaces all previous versions. New features in this version: Revised to support AutoCAD 2014 and 2015 This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While there exists some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.

Authors:
 [1];  [1];  [1];  [2];  [2];  [1]
  1. Sandia National Laboratories
  2. L&M Technologies
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1343553
Report Number(s):
Sandia Advanced MEMS Design Tools; 005148MLTPL00
SCR #392.6
DOE Contract Number:
AC04-94AL85000
Resource Type:
Software
Software Revision:
00
Software Package Number:
005148
Software CPU:
MLTPL
Source Code Available:
No
Country of Publication:
United States

Citation Formats

Yarberry, Victor R., Allen, James J., Lantz, Jeffrey W., Priddy, Brian, Westlin, Belinda, and Young, Andrew. Sandia Advanced MEMS Design Tools v. 3.0. Computer software. Vers. 00. USDOE. 25 Aug. 2016. Web.
Yarberry, Victor R., Allen, James J., Lantz, Jeffrey W., Priddy, Brian, Westlin, Belinda, & Young, Andrew. (2016, August 25). Sandia Advanced MEMS Design Tools v. 3.0 (Version 00) [Computer software].
Yarberry, Victor R., Allen, James J., Lantz, Jeffrey W., Priddy, Brian, Westlin, Belinda, and Young, Andrew. Sandia Advanced MEMS Design Tools v. 3.0. Computer software. Version 00. August 25, 2016.
@misc{osti_1343553,
title = {Sandia Advanced MEMS Design Tools v. 3.0, Version 00},
author = {Yarberry, Victor R. and Allen, James J. and Lantz, Jeffrey W. and Priddy, Brian and Westlin, Belinda and Young, Andrew},
abstractNote = {This is a major revision to the Sandia Advanced MEMS Design Tools. It replaces all previous versions. New features in this version: Revised to support AutoCAD 2014 and 2015 This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While there exists some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.},
doi = {},
year = 2016,
month = 8,
note =
}

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  • Sandia Advanced MEMS Design Tools is a 5-level surface micromachine fabrication technology, which customers internal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c)Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at SNL e) Facilitate the process of having post-fabrication services performed While there exist some files on the CD that aremore » used in conjunction with the software AutoCAD, these files are not intended for use independent of the CD. NOTE: THE CUSTOMER MUST PURCHASE HIS/HER OWN COPY OF AutoCAD TO USE WITH THESE FILES.« less
  • SUMMiT V (Sandia Ultra planar Multi level MEMS Technology) is a 5 level surface micromachine fabrication technology, which customers intornal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While theremore » exist some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Nole that the customer must purchase his/her own copy of Aut0CAD to use with these files.« less
  • The Sandia National Laboratories Advanced MEMS Design Tools, Version 2.2.5, is a collection of menus, prototype drawings, and executables that provide significant productivity enhancements when using AutoCAD to design MEMS components. This release is designed for AutoCAD 2000i, 2002, or 2004 and is supported under Windows NT 4.0, Windows 2000, or XP. SUMMiT V (Sandia Ultra planar Multi level MEMS Technology) is a 5 level surface micromachine fabrication technology, which customers internal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication processmore » b) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) New features in this version: AutoCAD 2004 support has been added. SafeExplode ? a new feature that explodes blocks without affecting polylines (avoids exploding polylines into objects that are ignored by the DRC and Visualization tools). Layer control menu ? a pull-down menu for selecting layers to isolate, freeze, or thaw. Updated tools: A check has been added to catch invalid block names. DRC features: Added username/password validation, added a method to update the user?s password. SNL_DRC_WIDTH ? a value to control the width of the DRC error lines. SNL_BIAS_VALUE ? a value use to offset selected geometry SNL_PROCESS_NAME ? a value to specify the process name Documentation changes: The documentation has been updated to include the new features. While there exist some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.« less
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  • The SAMPLE (Sandia Agile MEMS Protyping, Layout tools, and Education) service makes Sandia`s state-of-the-art surface-micromachining fabrication process, known as SUMMiT, available to US industry for the first time. The service provides a short cause and customized computer-aided design (CAD) tools to assist customers in designing micromachine prototypes to be fabricated in SUMMiT. Frequent small-scale manufacturing runs then provide SAMPLE designers with hundreds of sophisticated MEMS (MicroElectroMechanical Systems) chips. SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology) offers unique surface-micromachining capabilities, including four levels of polycrystalline silicon (including the ground layer), flanged hubs, substrate contacts, one-micron design rules, and chemical-mechanical polishing (CMP) planarization.more » This paper describes the SUMMiT process, design tools, and other information relevant to the SAMPLE service and SUMMiT process.« less

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