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Title: Development of Charge Drain Coatings: Final CRADA Report


The primary goal of this CRADA project was to develop and optimize tunable resistive coatings prepared by atomic layer deposition (ALD) for use as charge-drain coatings on the KLA-Tencor digital pattern generators (DPGs).

  1. Argonne National Lab. (ANL), Argonne, IL (United States)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE; Defense Advanced Research Projects Agency (DARPA)
OSTI Identifier:
Report Number(s):
DOE Contract Number:
Resource Type:
Technical Report
Country of Publication:
United States

Citation Formats

Elam, Jeffrey W. Development of Charge Drain Coatings: Final CRADA Report. United States: N. p., 2017. Web. doi:10.2172/1341008.
Elam, Jeffrey W. Development of Charge Drain Coatings: Final CRADA Report. United States. doi:10.2172/1341008.
Elam, Jeffrey W. Tue . "Development of Charge Drain Coatings: Final CRADA Report". United States. doi:10.2172/1341008.
title = {Development of Charge Drain Coatings: Final CRADA Report},
author = {Elam, Jeffrey W.},
abstractNote = {The primary goal of this CRADA project was to develop and optimize tunable resistive coatings prepared by atomic layer deposition (ALD) for use as charge-drain coatings on the KLA-Tencor digital pattern generators (DPGs).},
doi = {10.2172/1341008},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 17 00:00:00 EST 2017},
month = {Tue Jan 17 00:00:00 EST 2017}

Technical Report:

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  • The initial work on microwave annealing of dense silicon nitride showed enhanced grain growth and improved creep resistance for materials annealed at temperatures of 1,200--1500 C. In those tests, the anneal times were on the order of 10--20 h to achieve the observed changes. To further study the effectiveness of microwave annealing, a Cooperative Research and Development Agreement (CRADA) was started in the area of microwave processing of silicon nitride with Garrett Ceramic Components/Allied-Signal (GCC/AS). The original plan was for ORNL to microwave anneal specimens of dense silicon nitride with high additive contents (> 5%) provided by GCC/AS at variousmore » times and temperatures. There were to be three sample types and 3--4 annealing conditions for a total of 9--12 annealing runs. The materials would then be characterized by both ORNL and GCC/AS to determine any changes in the properties. The objectives were: (1) to determine the effects of microwave crystallization on mechanical properties, and (2) to compare the effectiveness of microwave versus conventional heating. The mechanical properties examined that were fracture toughness, flexural strength and high temperature stress rupture. Delays, organizational changes, and other commercialization priorities resulted in a termination of this CRADA. This report contains a summary of results from one silicon nitride composition.« less
  • Lockheed Martin Energy Systems, Inc. and Ferro Corporation (formerly W. R. Grace, the original CRADA partner) have collaborated on an effort to develop techniques and processes for the cost-effective machining of ceramic components. The purpose of this effort was to develop a machining model, and grinding equipment machines and techniques for fabricating precision ceramic components. This project was designed to support Department of Energy (DOE) technical needs in manufacturing hard materials as well as enabling U.S. industry to maintain a position of leadership in the production of precision grinding machines and the machining of structural ceramic components.
  • The objective of this Cooperative Research and Development project (CRADA) was to generate a new design for a microwave vacuum window to be used with ASTeX Corporation plasma processing equipment. This vacuum window allows transmission of microwave power from an input waveguide into a vacuum chamber for creation of plasma using the electron cyclotron resonance process. Requirements for the window design are: higher power capability, improved resistance to chemical attack, and physical compatibility with previous window models. In these applications, a significant portion of the input power is deposited in the window by plasma bombardment so the window must removemore » a great deal of heat to remain at a reliable operating temperature. A power level increase from 1.5 kW to 5 kW is desired by ASTeX for the new window which must have {approximately} 120 mm diameter and be compatible with existing hardware. New applications for these processing systems are being developed by ASTeX; these require the use of highly reactive fluorine plasmas which can rapidly etch some window materials. Therefore, the use of a fluorine compatible window ceramic is required. Two new window designs were investigated using advanced window-modeling techniques and low-power laboratory testing. It was determined that both concepts were capable of operating at significantly higher power levels than present commercial windows and would meet the CRADA design objectives. The compatibility of the window materials considered with fluorine plasmas are believed to be acceptable. ASTeX has a continuing interest in pursuing these window designs and will likely begin manufacturing design work of the improved design in the near future. There will also be a continuing effort to keep AlN ceramic manufacturers interested in improving the quality of large AlN disks. Additional window tests and development work could be performed by ORNL/MMES if a suitable funding source is available.« less
  • The purpose of this CRADA was to develop improved glass capillary, x-ray optics for analytical x-ray microbeam applications. X-Ray Optical Systems, Inc. (XOS) designed and fabricated capillary optics and LMES tested those optics for x-ray microanalytical applications using its unique X-Ray Microprobe. Tapered capillaries with 3-{micro}m and 8-{micro}m output openings were fabricated and tested. The tapered capillaries had better spectral quality for x-ray microfluorescence (XRMF) analysis, than non-tapered, straight capillaries that are currently used in the system. X-ray beam count-rates for the tapered capillaries were also greater than the straight capillaries. Two monolithic, polycapillary optics were fabricated and tested. Themore » polycapillary optics produced focal spots of 40 and 100 {micro}m. Beam intensities for the polycapillaries were, respective, 44 and 18 times the intensities found in straight 50-{micro}m and 100-{micro}m capillaries. High-sensitivity scanning will be possible because of the enhanced intensity of the polycapillary optic. LMES and the DP program will benefit from improved capabilities for nondestructive x-ray microanalysis, while XOS will benefit from test results that will enhance the marketability of their products.« less