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Title: Development of Charge Drain Coatings: Final CRADA Report

Abstract

The primary goal of this CRADA project was to develop and optimize tunable resistive coatings prepared by atomic layer deposition (ALD) for use as charge-drain coatings on the KLA-Tencor digital pattern generators (DPGs).

Authors:
 [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE; Defense Advanced Research Projects Agency (DARPA)
OSTI Identifier:
1341008
Report Number(s):
ANL/ESD-C1201101
132984
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Elam, Jeffrey W. Development of Charge Drain Coatings: Final CRADA Report. United States: N. p., 2017. Web. doi:10.2172/1341008.
Elam, Jeffrey W. Development of Charge Drain Coatings: Final CRADA Report. United States. doi:10.2172/1341008.
Elam, Jeffrey W. Tue . "Development of Charge Drain Coatings: Final CRADA Report". United States. doi:10.2172/1341008. https://www.osti.gov/servlets/purl/1341008.
@article{osti_1341008,
title = {Development of Charge Drain Coatings: Final CRADA Report},
author = {Elam, Jeffrey W.},
abstractNote = {The primary goal of this CRADA project was to develop and optimize tunable resistive coatings prepared by atomic layer deposition (ALD) for use as charge-drain coatings on the KLA-Tencor digital pattern generators (DPGs).},
doi = {10.2172/1341008},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 17 00:00:00 EST 2017},
month = {Tue Jan 17 00:00:00 EST 2017}
}

Technical Report:

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