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Title: Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors

Authors:
; ; ;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1337710
Grant/Contract Number:
SC0006339
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 33; Journal Issue: 2; Related Information: CHORUS Timestamp: 2017-05-25 13:55:07; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Hagmann, Mark J., Andrei, Petru, Pandey, Shashank, and Nahata, Ajay. Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors. United States: N. p., 2015. Web. doi:10.1116/1.4905095.
Hagmann, Mark J., Andrei, Petru, Pandey, Shashank, & Nahata, Ajay. Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors. United States. doi:10.1116/1.4905095.
Hagmann, Mark J., Andrei, Petru, Pandey, Shashank, and Nahata, Ajay. Sun . "Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors". United States. doi:10.1116/1.4905095.
@article{osti_1337710,
title = {Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors},
author = {Hagmann, Mark J. and Andrei, Petru and Pandey, Shashank and Nahata, Ajay},
abstractNote = {},
doi = {10.1116/1.4905095},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
number = 2,
volume = 33,
place = {United States},
year = {Sun Mar 01 00:00:00 EST 2015},
month = {Sun Mar 01 00:00:00 EST 2015}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1116/1.4905095

Citation Metrics:
Cited by: 5 works
Citation information provided by
Web of Science

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