skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Confocal sputtering of conformal α-β phase W films on etched Al features

Authors:
; ; ; ; ; ;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1337708
Grant/Contract Number:
FG02-13ER41918
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 33; Journal Issue: 1; Related Information: CHORUS Timestamp: 2017-03-31 07:30:51; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Kreikebaum, John Mark, Cabrera, Blas, Yen, Jeffrey J., Brink, Paul L., Cherry, Matt, Tomada, Astrid, and Young, Betty A. Confocal sputtering of conformal α-β phase W films on etched Al features. United States: N. p., 2015. Web. doi:10.1116/1.4904422.
Kreikebaum, John Mark, Cabrera, Blas, Yen, Jeffrey J., Brink, Paul L., Cherry, Matt, Tomada, Astrid, & Young, Betty A. Confocal sputtering of conformal α-β phase W films on etched Al features. United States. doi:10.1116/1.4904422.
Kreikebaum, John Mark, Cabrera, Blas, Yen, Jeffrey J., Brink, Paul L., Cherry, Matt, Tomada, Astrid, and Young, Betty A. Thu . "Confocal sputtering of conformal α-β phase W films on etched Al features". United States. doi:10.1116/1.4904422.
@article{osti_1337708,
title = {Confocal sputtering of conformal α-β phase W films on etched Al features},
author = {Kreikebaum, John Mark and Cabrera, Blas and Yen, Jeffrey J. and Brink, Paul L. and Cherry, Matt and Tomada, Astrid and Young, Betty A.},
abstractNote = {},
doi = {10.1116/1.4904422},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
number = 1,
volume = 33,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 2015},
month = {Thu Jan 01 00:00:00 EST 2015}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1116/1.4904422

Citation Metrics:
Cited by: 1work
Citation information provided by
Web of Science

Save / Share: