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Title: Chemical vapor deposition using N,O polydentate ligand complexes of metals

Abstract

Complexes of metals and N,O polydentate ligands are useful as precursors in the preparation of doped zinc oxide coatings by chemical vapor deposition.

Inventors:
; ;
Publication Date:
Research Org.:
Arkema Inc. King of Prussia, PA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1337677
Patent Number(s):
9,528,182
Application Number:
13/377,858
Assignee:
Arkema Inc. (King of Prussia, PA NETL
DOE Contract Number:  
FC26-08NT01576
Resource Type:
Patent
Resource Relation:
Patent File Date: 2010 Jun 09
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Bluhm, Martin E., Silverman, Gary S., and Korotkov, Roman Y. Chemical vapor deposition using N,O polydentate ligand complexes of metals. United States: N. p., 2016. Web.
Bluhm, Martin E., Silverman, Gary S., & Korotkov, Roman Y. Chemical vapor deposition using N,O polydentate ligand complexes of metals. United States.
Bluhm, Martin E., Silverman, Gary S., and Korotkov, Roman Y. Tue . "Chemical vapor deposition using N,O polydentate ligand complexes of metals". United States. doi:. https://www.osti.gov/servlets/purl/1337677.
@article{osti_1337677,
title = {Chemical vapor deposition using N,O polydentate ligand complexes of metals},
author = {Bluhm, Martin E. and Silverman, Gary S. and Korotkov, Roman Y.},
abstractNote = {Complexes of metals and N,O polydentate ligands are useful as precursors in the preparation of doped zinc oxide coatings by chemical vapor deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 27 00:00:00 EST 2016},
month = {Tue Dec 27 00:00:00 EST 2016}
}

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