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Title: Three-dimensional patterning methods and related devices


Three-dimensional patterning methods of a three-dimensional microstructure, such as a semiconductor wire array, are described, in conjunction with etching and/or deposition steps to pattern the three-dimensional microstructure.

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Publication Date:
Research Org.:
The California Institute of Technology, Pasadena, CA (United States)
Sponsoring Org.:
OSTI Identifier:
Patent Number(s):
Application Number:
The California Institute of Technology (Pasadena, CA)
DOE Contract Number:  
SC0001293; FG02-07ER46405
Resource Type:
Resource Relation:
Patent File Date: 2010 Nov 30
Country of Publication:
United States

Citation Formats

Putnam, Morgan C., Kelzenberg, Michael D., Atwater, Harry A., Boettcher, Shannon W., Lewis, Nathan S., Spurgeon, Joshua M., Turner-Evans, Daniel B., and Warren, Emily L. Three-dimensional patterning methods and related devices. United States: N. p., 2016. Web.
Putnam, Morgan C., Kelzenberg, Michael D., Atwater, Harry A., Boettcher, Shannon W., Lewis, Nathan S., Spurgeon, Joshua M., Turner-Evans, Daniel B., & Warren, Emily L. Three-dimensional patterning methods and related devices. United States.
Putnam, Morgan C., Kelzenberg, Michael D., Atwater, Harry A., Boettcher, Shannon W., Lewis, Nathan S., Spurgeon, Joshua M., Turner-Evans, Daniel B., and Warren, Emily L. Tue . "Three-dimensional patterning methods and related devices". United States.
title = {Three-dimensional patterning methods and related devices},
author = {Putnam, Morgan C. and Kelzenberg, Michael D. and Atwater, Harry A. and Boettcher, Shannon W. and Lewis, Nathan S. and Spurgeon, Joshua M. and Turner-Evans, Daniel B. and Warren, Emily L.},
abstractNote = {Three-dimensional patterning methods of a three-dimensional microstructure, such as a semiconductor wire array, are described, in conjunction with etching and/or deposition steps to pattern the three-dimensional microstructure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {12}


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