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Title: Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.

Abstract

Abstract not provided.

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1336347
Report Number(s):
SAND2015-8721C
615265
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the SPIE Laser Damage Symposium held September 27-30, 2015 in Boulder, CO.
Country of Publication:
United States
Language:
English

Citation Formats

Xu, Yejia, Schiltz, Drew, Emmert, Luke, Brown, Andrew, Talghader, Joseph, Kletecka, Damon E., Field, Ella Suzanne, Bellum, John Curtis, Patel, Dinesh, Menoni, Carmen, and Rudolph, Wolfgang. Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.. United States: N. p., 2015. Web.
Xu, Yejia, Schiltz, Drew, Emmert, Luke, Brown, Andrew, Talghader, Joseph, Kletecka, Damon E., Field, Ella Suzanne, Bellum, John Curtis, Patel, Dinesh, Menoni, Carmen, & Rudolph, Wolfgang. Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.. United States.
Xu, Yejia, Schiltz, Drew, Emmert, Luke, Brown, Andrew, Talghader, Joseph, Kletecka, Damon E., Field, Ella Suzanne, Bellum, John Curtis, Patel, Dinesh, Menoni, Carmen, and Rudolph, Wolfgang. Thu . "Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.". United States. https://www.osti.gov/servlets/purl/1336347.
@article{osti_1336347,
title = {Comparative STEREO-LID (spatio-temporally resolved optical laser-induced damage) studies of critical defect distributions in IBS ALD and electron-beam coated dielectric films.},
author = {Xu, Yejia and Schiltz, Drew and Emmert, Luke and Brown, Andrew and Talghader, Joseph and Kletecka, Damon E. and Field, Ella Suzanne and Bellum, John Curtis and Patel, Dinesh and Menoni, Carmen and Rudolph, Wolfgang},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {10}
}

Conference:
Other availability
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