Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides

Zhou, Lan; Suram, Santosh K.; Becerra-Stasiewicz, Natalie; Mitrovic, Slobodan; Kan, Kevin; Jones, Ryan J. R.; Gregoire, John M.

doi:10.1557/jmr.2015.140

Title: Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides

Journal Article · Wed May 27 00:00:00 EDT 2015 · Journal of Materials Research

DOI:https://doi.org/10.1557/jmr.2015.140· OSTI ID:1334193

Zhou, Lan ^[1]; Suram, Santosh K. ^[1]; Becerra-Stasiewicz, Natalie ^[1]; Mitrovic, Slobodan ^[1]; Kan, Kevin ^[1]; Jones, Ryan J. R. ^[1];

^[1]

California Inst. of Technology (CalTech), Pasadena, CA (United States). Joint Center for Artificial Photosynthesis (JCAP)

Recent efforts have demonstrated enhanced tailoring of material functionality with mixed-anion materials, yet exploratory research with mixed-anion chemistries is limited by the sensitivity of these materials to synthesis conditions. In order to synthesize a particular metal oxynitride compound by traditional reactive annealing we require specific, limited ranges of both oxygen and nitrogen chemical potentials in order to establish equilibrium between the solid-state material and a reactive atmosphere. While using Ta-O-N as an example system, we describe a combination of reactive sputter deposition and rapid thermal processing for synthesis of mixed-anion inorganic materials. Heuristic optimization of reactive gas pressures to attain a desired anion stoichiometry is discussed, and the ability of rapid thermal processing to enable amorphous to crystalline transitions without preferential anion loss is demonstrated through the controlled synthesis of nitride, oxide and oxynitride phases.

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Research Organization:: California Institute of Technology (CalTech), Pasadena, CA (United States). Joint Center for Artificial Photosynthesis (JCAP)

Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0004993

OSTI ID:: 1334193

Journal Information:: Journal of Materials Research, Vol. 30, Issue 19; ISSN 0884-2914

Publisher:: Materials Research SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 10 works

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Defect Engineering for Photocatalysis: From Ternary to Perovskite Oxynitrides Brown, Joshua J.; Ke, Zhuofeng; Ma, Tianyi ChemNanoMat, Vol. 6, Issue 5 https://doi.org/10.1002/cnma.201900703	journal	February 2020
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36 MATERIALS SCIENCE
oxynitrides
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Title: Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides

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