Inductively Coupled BCl3/Cl2/Ar Plasma Etching of High Al Content AlGaN.

Title: Inductively Coupled BCl3/Cl2/Ar Plasma Etching of High Al Content AlGaN.

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Abstract

Abstract not provided.

Authors:: Douglas, Erica Ann; Allerman, Andrew A.; Baca, Albert G.; Sanchez, Carlos Anthony; Kaplar, Robert

Publication Date:: 2015-10-01

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1332044

Report Number(s):: SAND2015-9066C
607927

DOE Contract Number:: AC04-94AL85000

Resource Type:: Conference

Resource Relation:: Conference: Proposed for presentation at the Electrochemical Society Meeting held October 11-16, 2015 in Phoenix, Az.

Country of Publication:: United States

Language:: English

Citation Formats


                    Douglas, Erica Ann, Allerman, Andrew A., Baca, Albert G., Sanchez, Carlos Anthony, and Kaplar, Robert. Inductively Coupled BCl3/Cl2/Ar Plasma Etching of High Al Content AlGaN..  United States: N. p., 2015. 
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                    Douglas, Erica Ann, Allerman, Andrew A., Baca, Albert G., Sanchez, Carlos Anthony, & Kaplar, Robert. Inductively Coupled BCl3/Cl2/Ar Plasma Etching of High Al Content AlGaN..  United States.

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                    Douglas, Erica Ann, Allerman, Andrew A., Baca, Albert G., Sanchez, Carlos Anthony, and Kaplar, Robert. Thu .  
        "Inductively Coupled BCl3/Cl2/Ar Plasma Etching of High Al Content AlGaN.".  United States.  https://www.osti.gov/servlets/purl/1332044.

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@article{osti_1332044,

  title        = {Inductively Coupled BCl3/Cl2/Ar Plasma Etching of High Al Content AlGaN.},

  author       = {Douglas, Erica Ann and Allerman, Andrew A. and Baca, Albert G. and Sanchez, Carlos Anthony and Kaplar, Robert},

  abstractNote = {Abstract not provided.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2015},

  month        = {10}

}

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