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Title: Mechanical alignment of substrates to a mask

Abstract

A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.

Inventors:
; ; ; ; ;
Publication Date:
Research Org.:
Varian Semiconductor Equipment Associates, Inc. Gloucester, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1331180
Patent Number(s):
9,490,153
Application Number:
14/323,088
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA) DOEEE
DOE Contract Number:  
EE0004737
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Jul 03
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Webb, Aaron P., Carlson, Charles T., Honan, Michael, Amato, Luigi G., Grant, Christopher Neil, and Strassner, James D. Mechanical alignment of substrates to a mask. United States: N. p., 2016. Web.
Webb, Aaron P., Carlson, Charles T., Honan, Michael, Amato, Luigi G., Grant, Christopher Neil, & Strassner, James D. Mechanical alignment of substrates to a mask. United States.
Webb, Aaron P., Carlson, Charles T., Honan, Michael, Amato, Luigi G., Grant, Christopher Neil, and Strassner, James D. Tue . "Mechanical alignment of substrates to a mask". United States. doi:. https://www.osti.gov/servlets/purl/1331180.
@article{osti_1331180,
title = {Mechanical alignment of substrates to a mask},
author = {Webb, Aaron P. and Carlson, Charles T. and Honan, Michael and Amato, Luigi G. and Grant, Christopher Neil and Strassner, James D.},
abstractNote = {A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 08 00:00:00 EST 2016},
month = {Tue Nov 08 00:00:00 EST 2016}
}

Patent:

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